Dr. Hiroshi Ikegami Profile

Dr. Hiroshi Ikegami

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 28 May 2004 Paper

A new process for accurate alignment using laser ablation technology

Hiroshi Ikegami, Kenji Kawano, Kazuhiko Ishigo, Tatsuhiko Higashiki, Nobuo Hayasaka, Naoto Yoshitaka, Hideaki Kashiwagi , Masayoshi Kobayashi, Yoichi Ogawa, Shinichi Ito

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534907

KEYWORDS: Aluminum, Laser irradiation, Laser ablation, Optical alignment, Semiconducting wafers, Thin films, Plasma, Metals, Tin, Laser applications

Read Abstract +

Proceedings Article | 28 May 2004 Paper

TTR (through the reticle) alignment system with photoresist ablation technique

Ryo Tanaka, Mitsuru Kobayashi, Masahiko Yasuda, Nobutaka Magome, Kazuhiko Ishigo, Hiroshi Ikegami, Tatsuhiko Higashiki

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.544231

KEYWORDS: Optical alignment, Semiconducting wafers, Laser ablation, Reticles, Opacity, Signal detection, Absorption, Silicon, Q switching, YAG lasers

Read Abstract +

Proceedings Article | 12 June 2003 Paper

Novel laser ablation patterning with organic thin film in running water

Shinichi Ito, Hiroshi Ikegami, Kenji Kawano, Tomoyuki Takeishi, Nobuo Hayasaka, Masayoshi Kobayashi, Tetsuya Hamamoto, Yoichi Ogawa, Naoto Yoshitaka, Shoichi Terada

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485045

KEYWORDS: Laser ablation, Particles, Photoresist processing, Optical lithography, Optical alignment, Video, Cameras, Thin films, Lithography, Natural surfaces

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years