Jin Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 113280I (2020) https://doi.org/10.1117/12.2551970
KEYWORDS: Metals, Design for manufacturing, Chemical mechanical planarization, Silicon, Reliability, Optical proximity correction, Semiconducting wafers, Extreme ultraviolet lithography, Manufacturing, Yield improvement

Proceedings Article | 4 April 2019 Presentation + Paper
Proceedings Volume 10962, 1096204 (2019) https://doi.org/10.1117/12.2514896
KEYWORDS: Computer aided design, Metals, Resolution enhancement technologies, Optical lithography, CMOS technology, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Double patterning technology, Manufacturing

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