Ms. Jinwei Zhang Profile

Jinwei Zhang

at Shanghai Institute of Optics & Fine Mechanics CAS

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Proceedings Article | 18 December 2023 Paper

Study on electrostatic rotation of the micromirror in illumination system under UV laser irradiation

Jingwei Zhang, Jingpei Hu, Aijun Zeng, Huijie Huang

Proceedings Volume 12964, 129640I (2023) https://doi.org/10.1117/12.3007733

KEYWORDS: Micromirrors, Ultraviolet radiation, Lithography, Thermal deformation, Silicon

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In lithography, the micromirror array (MMA) is utilized in the generation of customized source shapes optimized by source and mask optimization (SMO) technology. With irradiated laser ejecting from the surface of micromirror, the facula is positioned at the designated position. Through the progressive torsion of cantilevers, the electrostatic actuated micromirror realizes high-precision rotation corresponding to different driving voltages. Irradiated by 193nm UV laser, the heat sink accumulated on MMA leads to thermal expansion of structures. Thus, the voltage-angle (V-θ) curve serves deviation from the theoretical value, resulting in the distortion of illumination modes further. In order to estimate and eliminate the unfavorable effects on the rotation of MMA induced by heat sink, a biaxial electrostatic driven micromirror is initially designed and a multi-physical field model is established. Through equating the laser to a 2D surface source, in the thermal equilibrium state, the mirror surface temperature rises to 395.92K, with an introduced angular error of 3.313mrad when the driving voltage is 70V. The additional angle would exceed the design requirements of MMA and result in modes distortion. In order to eliminate the deformation of illumination mode in the pupil, a forced nitrogen cooling system is applied to suppress the accumulation of heat. Ultimately, the MMA without structural deformation could be adopted in the freeform pupil illumination modes generation in lithography.

Proceedings Article | 24 November 2021 Paper

Fingerprint segmentation of UV induced fluorescence image using fuzzy enhancement

Jingwei Zhang, Lihua Huang, Liqing Ling, Huijie Huang

Proceedings Volume 12065, 1206531 (2021) https://doi.org/10.1117/12.2606797

KEYWORDS: Image segmentation, UV optics, Optoelectronics

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Fingerprints, a kind of reliable and accessible biological characteristic for individual identification, are commonly used on many occasions such as the mobile phone unlocking and criminal investigation. In this paper, a method based on fuzzy enhancement is proposed to segment fluorescence images of invisible fingerprints which are induced by ultraviolet laser on porous paper substrates. With the purpose of achieving the segmentation of latent fingerprints, the fuzzy enhancement and morphological operators are employed to extract the minutia while the ridge structures and valley structures are ruined by intensive background noises. In combination with the directional image, the method proposed could effectively remove the noises and obtain clear visible minutia simultaneously. The effectiveness of the method proposed shows great promise for further analysis of latent fingerprints and even in criminal investigation.

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