We show the SAW resonators and ladder type SAW resonator filters using high coupling SiO2/5°Y-X LiNbO3 with Zero Temperature Coefficients of Frequency (TCF). The theoretical analysis of 5~10GHz ladder type filters including the propagation attenuations and resistive loss of interdigital transducers are shown. Finally the experimental results below 2.0dB insertion loss with a wide band and zero TCF at 5 ~ 10GHz-range are shown.
SiO2/rotated Y-cut, X-propagating LiNbO3 leaky SAW substrates with a large k2(over 0.2) and zero TCF at a small thickness of SiO2 of H/λ=0.2 (H: SiO2 film thickness, λ: (SAW wave-length) compared to those of other substrates and zero propagation attenuation in the case of metalized surface. Theoretical and experimental results for low-loss filters, resonators and resonator filters are described. The low-loss filters using (FEUDT) showed an insertion loss of below 1dB at a center frequency of 400MHz and bandwidth of 20MHz using micro-fabrication technology. Also, the resonator showed wide-band characteristics and resonator filters showed a bandwidth of 89MHz at a center frequency of 500MHz.
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