Ni Hu
at National Univ of Singapore
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 November 2007 Paper
Ni Hu, Shihao Tang, Xiaowen Li
Proceedings Volume 6790, 67901H (2007) https://doi.org/10.1117/12.748904
KEYWORDS: Transmittance, MODIS, Atmospheric modeling, Carbon monoxide, Gases, Ozone, Oxygen, Methane, Atmospheric particles, Remote sensing

Proceedings Article | 5 April 2007 Paper
Arthur Tay, Weng-Khuen Ho, Ni Hu, Choon-Meng Kiew, Kuen-Yu Tsai
Proceedings Volume 6518, 65182N (2007) https://doi.org/10.1117/12.711509
KEYWORDS: Photoresist developing, Photoresist materials, Semiconducting wafers, Lithography, Spectrometers, Critical dimension metrology, Process control, Photoresist processing, Reflectivity, Integrated circuits

Proceedings Article | 10 March 2006 Paper
Arthur Tay, Weng-Khuen Ho, Ni Hu, Kuen-Yu Tsai, Ying Zhou
Proceedings Volume 6155, 61550A (2006) https://doi.org/10.1117/12.654741
KEYWORDS: Semiconducting wafers, Optical lithography, Control systems, Thermal modeling, Resistance, Temperature sensors, Photoresist processing, Sensors, Process control, Critical dimension metrology

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