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Pey-Yuan Lee
IPQE Engineer at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (1)
Proceedings Article | 15 July 2003 Paper
Complete monitoring strategy to quantify matching and performance for multiple CDSEM in advanced fab
Pey-Yuan Lee, Chi-Shen Lo, Yi-Hung Chen, Thomas Teng, Steven Fu, Mico Chu, Jason Yee
Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485227
KEYWORDS: Metals, Data modeling, Materials processing, Material characterization, Diagnostics, Manufacturing, Carbon, Contamination, Plasma, Critical dimension metrology
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