There are many solutions used for current measurements in power lines. The study shows a transducer consisting of a
ferromagnetic core, a beam placed in an air-gap and a sensor for optical readout. The beam is made of silicon with a thin
50%Ni50%Fe film. The material of the core is permalloy. A distribution of magnetic field depends on current supplying
the power line. The beam is deflected due to magnetic field in the air-gap. A deflection of the beam is measured by the
optical fibre sensor. Its advantage is simple design, high precision of processing, non-electric transmission, low costs and
ability of a non-contact measurement.
Comsol Multiphysics 4.4 and Magnetic Fields Module (mef) were used for modeling. An influence of magnetic circuit's
materials and dimensions of the ferromagnetic core and the air-gap were tested in order to determine the most sufficient
distribution of magnetic field in the air-gap. The study shows results of the modeling of the transducer compared to
practical results for a similar construction scaled down to lower current values.
The study shows an analysis of numerical models of MEMS transducers used for magnetic field measurements.
Movable silicon microbeam structures attached from one side were considered. A ferromagnetic NiFe layer was
deposited on the microbeams’ surfaces by magnetron sputtering. In a magnetic field, there is a torque acting on a beam
with NiFe layer. There is a change in a deflection angle of a free end of the beam according to the magnetic field
strength. The impact of the beam parameters and its attachment on the deflection was analyzed for the tested numerical
models of the transducers. An optoelectronic test system can be used to measure the beam’s end deflection. Experimental
characteristics obtained from a test system for rotation angle transducers were shown. Range of measurements
corresponds to the tested models.
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