YunZhe Shao
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295513 (2024) https://doi.org/10.1117/12.3009911
KEYWORDS: Extreme ultraviolet, Polymers, Diffraction, Scatterometry, Reflectometry, Metamaterials, Scanning transmission electron microscopy, Biological samples, Charge-coupled devices, Statistical modeling

Proceedings Article | 27 April 2023 Presentation + Paper
Yuka Esashi, Nicholas Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua Knobloch, Henry Kapteyn, Margaret Murnane
Proceedings Volume 12496, 1249614 (2023) https://doi.org/10.1117/12.2658543
KEYWORDS: Reflectometry, Extreme ultraviolet, Nanostructures, Diffraction, Surface roughness, Metrology, Phase retrieval, High harmonic generation, Chemical composition

Proceedings Article | 1 December 2022 Presentation + Paper
Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726
KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

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