Yusuke Nakatani
at Hitachi Hightech Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 April 2023 Poster
Proceedings Volume PC12499, PC124990I (2023) https://doi.org/10.1117/12.2656040
KEYWORDS: Etching, Dielectrics, Gallium arsenide, Reactive ion etching, Manufacturing, Transistors, Plasma etching, Plasma, Magnetism, Ions

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