Mr. Ardis Liang Profile

Ardis Liang

at KLA Corp

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Publications (2)

Proceedings Article | 13 October 2021 Presentation + Paper

Deep learning-based defect detection using large FOV SEM for 28 nm pitch BEOL layer patterned with 0.33NA single exposure EUV

Sayantan Das, Kaushik Sah, Ardis Liang, Hemanta Roy, Kha Tran, Binesh Babu, Arjun Hegde, Andrew Cross, Philippe Leray, Sandip Halder

Proceedings Volume 11854, 118540Y (2021) https://doi.org/10.1117/12.2600954

KEYWORDS: Inspection, Defect detection, Semiconducting wafers, Scanning electron microscopy, Extreme ultraviolet lithography, Critical dimension metrology, Etching

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Proceedings Article | 22 February 2021 Presentation + Paper

Defect characterization of 28 nm pitch EUV single patterning structures for iN5 node

Kaushik Sah, Sayantan Das, Andrew Cross, Kay Peng, Kha Tran, Binesh Babu, Ardis Liang, Danilo De Simone, Philippe Leray, Sandip Halder

Proceedings Volume 11611, 1161128 (2021) https://doi.org/10.1117/12.2584760

KEYWORDS: Semiconducting wafers, Extreme ultraviolet, Electron beam lithography, Optical inspection, Inspection, Wafer-level optics, Wafer inspection, Stochastic processes, Optics manufacturing, Lithography

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