Dr. Bryan M. Tracy Profile

Dr. Bryan M. Tracy

at EAG Labs

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 22 March 2008 Paper

TEM validation of CD AFM image reconstruction: part II

Gregory Dahlen, Hao-Chih Liu, Marc Osborn, Jason Osborne, Bryan Tracy, Amalia del Rosario

Proceedings Volume 6922, 69220K (2008) https://doi.org/10.1117/12.773237

KEYWORDS: Transmission electron microscopy, Atomic force microscopy, Error analysis, Calibration, Image restoration, Photomicroscopy, Scanners, Metrology, Critical dimension metrology, Reconstruction algorithms

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Proceedings Article | 5 April 2007 Paper

TEM validation of CD AFM image reconstruction

Gregory Dahlen, Lars Mininni, Marc Osborn, Hao-Chih Liu, Jason Osborne, Bryan Tracy, Amalia del Rosario

Proceedings Volume 6518, 651818 (2007) https://doi.org/10.1117/12.711943

KEYWORDS: Transmission electron microscopy, Atomic force microscopy, Critical dimension metrology, Image restoration, Metrology, Photomicroscopy, Calibration, Reconstruction algorithms, Feature extraction, Image processing

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Proceedings Article | 24 May 2004 Paper

Nanocal calibration and pitch recertification of a Hitachi microscale standard

Dmitry Yeremin, Arkady Nikitin, Al Sicignano, Matt Sandy, Tim Goldburt, Bryan Tracy

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536095

KEYWORDS: Scanning electron microscopy, Calibration, Metrology, Statistical analysis, Standards development, Precision calibration, Software development, Error analysis, Roads, Material characterization

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Proceedings Article | 24 May 2004 Paper

A novel and robust method for the accurate magnification characterization and calibration of out-of-fab SEM cluster tools

Al Sicignano, Arkady Nikitin, Dmitry Yeremin, Tim Goldburt, Bryan Tracy

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536047

KEYWORDS: Calibration, Scanning electron microscopy, Metrology, Critical dimension metrology, Precision calibration, System integration, Logic, Roads, Material characterization, Data analysis

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