Ms. Chongxiang Li Profile

Chongxiang Li

PhD Student at Nanyang Technological Univ

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Author

Publications (6)

Proceedings Article | 17 August 2004 Paper

Application on multichannel V-groove inspection

Chongxiang Li, Anand Asundi, Zhong Ping Fang

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.544171

KEYWORDS: Inspection, Optical alignment, Silicon, Semiconducting wafers, 3D metrology, Sensors, Microelectromechanical systems, Anisotropic etching, Etching, Photomasks

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Proceedings Article | 4 September 2002 Paper

Double-detector-array 3D profile inspection system

Chongxiang Li, Zhong Fang, Anand Asundi

Proceedings Volume 4768, (2002) https://doi.org/10.1117/12.482184

KEYWORDS: Confocal microscopy, Light sources, 3D metrology, Inspection, 3D image processing, Sensors, Optical fibers, Imaging systems, Fiber couplers, Signal detection

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Proceedings Article | 4 September 2002 Paper

Light source fluctuation effect on confocal imaging system

Anand Asundi, Chongxiang Li, Yanfeng Zhang, Zhong Fang

Proceedings Volume 4768, (2002) https://doi.org/10.1117/12.482183

KEYWORDS: Light sources, Confocal microscopy, Imaging systems, Stereoscopy, Inspection, Error analysis, 3D metrology, 3D modeling, Image resolution, Light

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Proceedings Article | 20 June 2002 Paper

Novel C/T technique in LDA System

Chongxiang Li, Yan Zhang, Chang Liu, Shikang Wang, Jie Liu

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472242

KEYWORDS: Doppler effect, Laser Doppler velocimetry, Signal processing, Optical signal processing, Signal to noise ratio, Velocity measurements, Light scattering, Signal detection, Particles, Sensors

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Proceedings Article | 30 October 2001 Paper

Multichannel 3D profilometry

Chongxiang Li, Anand Asundi, Zhong Fang

Proceedings Volume 4596, (2001) https://doi.org/10.1117/12.447340

KEYWORDS: Confocal microscopy, 3D metrology, Fiber couplers, Light sources, Sensors, Photodetectors, 3D image processing, Semiconductor lasers, Interferometry, Spatial resolution

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Proceedings Article | 8 May 2001 Paper

Micro-moire methods: optical and scanning techniques

Anand Asundi, Huimin Xie, Chongxiang Li, Chai Boay, Kim Oh

Proceedings Volume 4416, (2001) https://doi.org/10.1117/12.426994

KEYWORDS: Moire patterns, Atomic force microscopy, Deflectometry, Interferometry, Interferometers, Fringe analysis, Collimation, Scanners, Atomic force microscope, Electronic components

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Showing 5 of 6 publications

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