Dr. Evgeniy S. Gornev Profile

Dr. Evgeniy S. Gornev

at JSC Molecular Electronics Research Institute

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 31 January 2022 Paper

A. Miakonkikh, A. Shishlyannikov, A. Tatarintsev, V. Kuzmenko, K. Rudenko, E. Gornev

Proceedings Volume 12157, 1215717 (2022) https://doi.org/10.1117/12.2626386

KEYWORDS: Etching, Silicon, Plasma, Plasma etching

Proceedings Article | 31 January 2022 Paper

Ekaterina Ganykina, Askar Rezvanov, Yevgeniy Gornev

Proceedings Volume 12157, 121570B (2022) https://doi.org/10.1117/12.2624576

KEYWORDS: Oxygen, Oxides, Electrodes, Hafnium, Ions, Diffusion, Switching, Dielectrics

Proceedings Article | 31 January 2022 Paper

Sergey Zyuzin, Yason Zasseev, Askar Rezvanov, Vitaliy Panin, Vladimir Gvozdev, Yevgeniy Gornev

Proceedings Volume 12157, 121571H (2022) https://doi.org/10.1117/12.2624575

KEYWORDS: Atomic layer deposition, Semiconducting wafers, Oxides, Plasma, Thin films, Thin film deposition, Refractive index, Oxygen

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Keywords/Phrases