Dr. Friedrich Koenig Profile

Dr. Friedrich Koenig

Sr Research and Development Manager at Merck KGaA

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Publications (1)

Proceedings Article | 25 February 2004 Paper

Ion-assisted deposition processes: industrial network IntIon

Henrik Ehlers, Karl-Josef Becker, Rudolf Beckmann, Nils Beermann, Ulf Brauneck, Peter Fuhrberg, Dieter Gaebler, Stefan Jakobs, Norbert Kaiser, Michael Kennedy, Friedrich Koenig, Sven Laux, Juergen Christian Mueller, Bernd Rau, Werner Riggers, Detlev Ristau, Dieter Schaefer, Olaf Stenzel

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.514817

KEYWORDS: Ions, Plasma, Niobium, Refractive index, Deposition processes, Resolution enhancement technologies, Coating, Prototyping, Oxygen, Absorption

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