Dr. Hongyuan Cai Profile

Dr. Hongyuan Cai

R&D Engineer at Synopsys Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 5 April 2019 Presentation + Paper

EUV mask synthesis with rigorous ILT for process window improvement

Kyle Braam, Kosta Selinidis, Wolfgang Hoppe, Hongyuan Cai, Guangming Xiao

Proceedings Volume 10962, 109620P (2019) https://doi.org/10.1117/12.2515156

KEYWORDS: Extreme ultraviolet, Photomasks, Stochastic processes, Lithography, Extreme ultraviolet lithography, 3D modeling, Optical lithography, Manufacturing, EUV optics, Electromagnetism

Read Abstract +

Proceedings Article | 20 March 2018 Paper

Rigorous ILT optimization for advanced patterning and design-process co-optimization

Kosta Selinidis, Bernd Kuechler, Howard Cai, Kyle Braam, Wolfgang Hoppe, Vitaly Domnenko, Amyn Poonawala, Guangming Xiao

Proceedings Volume 10587, 105870M (2018) https://doi.org/10.1117/12.2299375

KEYWORDS: Photomasks, Lithography, Optical lithography, 3D modeling, Optical proximity correction, Calibration, Photoresist processing, Manufacturing, Computer simulations, Source mask optimization

Read Abstract +

Proceedings Article | 24 March 2017 Paper

Addressing optical proximity correction challenges from highly nonlinear models

Stephen Jang, Yunqiang Zhang, Tom Cecil, Howard Cai, Amyn Poonawala, Matt St. John

Proceedings Volume 10147, 101471S (2017) https://doi.org/10.1117/12.2258088

KEYWORDS: Optical proximity correction, Lithography, Photomasks, Computational lithography, Lithium, 193nm lithography, Chemical elements, SRAF

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years