Dr. Huan He Profile

Dr. Huan He

at DuPont Electronics & Industrial

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Author

Publications (2)

Proceedings Article | 9 April 2024 Paper

Disruptive non-fluorinated photoacid generators using computational chemistry and library design

P. LaBeaume, K. Hernandez, E. Vitaku, T. Marangoni, E. Aqad, M. Li, C. Hoelzel, J. Lachowski, M. Hayes, S. Wong, J. Li, A. Kwok, W. Huang, J. Park, H. He, H. Mackay, C. Liu, J. Cameron, C. Xu, Q. Xie, K. Petrillo

Proceedings Volume 12957, 129572B (2024) https://doi.org/10.1117/12.3025297

KEYWORDS: Photoacid generators, Photoresist materials, Semiconducting wafers, Design, Lithography, Optical lithography, Coating thickness, Chemistry, Coating, Silicon, Sustainability, Extreme ultraviolet lithography

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Proceedings Article | 23 March 2020 Presentation + Paper

Challenges and opportunities of KrF photoresist development for 3D NAND application

Yang Song, Mingqi Li, Jong Park, Xisen Hou, Yusuke Matsuda, Cong Liu, Emad Aqad, Janet Wu, Huan He, Huiying Liu, Paul Baranowski, Cheng Bai Xu

Proceedings Volume 11326, 113260N (2020) https://doi.org/10.1117/12.2552140

KEYWORDS: Photoresist materials, Polymers, Absorbance, Coating, Photoresist developing, 3D applications, Transparency, Transmittance, Molecules, Lithography

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