Mr. James Thompson Profile

James Thompson

Engineer at Analog Devices

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Publications (4)

Proceedings Article | 2 June 2003 Paper

Evaluation of i-line Nikon Stepper leveling methods for improved CD control

Ronan Barry, James Thompson

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483536

KEYWORDS: Semiconducting wafers, Sensors, Critical dimension metrology, Diffraction, Metals, Oxides, Wafer testing, CCD cameras, Photomasks, Analog electronics

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Proceedings Article | 2 June 2003 Paper

Yield improvement due to edge shot parameter optimization

Owen Joyce, James Thompson, Shane Geary

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485013

KEYWORDS: Semiconducting wafers, Yield improvement, Inspection, Photomasks, Optical lithography, Photoresist materials, Modulation, Reticles, Metals, Photoresist processing

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Proceedings Article | 16 July 2002 Paper

Contrast enhancement materials for yield improvement in submicron i-line lithography

Shane Geary, James Thompson, Elliott Capsuto

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473430

KEYWORDS: Metals, Error analysis, Lithography, Manufacturing, Semiconducting wafers, Photoresist materials, Yield improvement, Thin film coatings, Photoresist processing, Submicron lithography

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Proceedings Article | 2 June 2000 Paper

Quantifying the effect of pattern density on focus offset

Shane Geary, James Thompson

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386513

KEYWORDS: Semiconducting wafers, Metals, Photoresist materials, Reticles, Chemical mechanical planarization, Lithography, Dielectrics, Wafer-level optics, Computer aided design, Sensors

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