CONFERENCE PROCEEDINGS
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Jiunn-Jye Tsaur
at AIST
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Author
Publications (4)
Proceedings Article | 2 April 2004 Paper
Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.530229
KEYWORDS: Ferroelectric materials, Mirrors, Micromirrors, Silicon, Etching, Wavelength division multiplexing, Sol-gels, Actuators, Scanning electron microscopy, Electrodes
Proceedings Article | 13 November 2002 Paper
Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469675
KEYWORDS: Ferroelectric materials, Mirrors, Sol-gels, Silicon, Laser ablation, Semiconducting wafers, Silicon films, Polarization, Actuators, Scanning electron microscopy
Proceedings Article | 5 April 2001 Paper
Development of microelectromechanical varactors
Chun-Hsien Lee, Shu-Hui Tsai, Chung-Hsien Lin, Ryutaro Maeda, Jiunn-Jye Tsaur, Kuan-Jen Fang, Ju-Mei Lu, Cheng-Kuo Lee, Weileun Fang
Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425389
KEYWORDS: Capacitance, Electrodes, Finite element methods, Electroplating, Capacitors, Microelectromechanical systems, Semiconductors, Nickel, Silicon, Resistance
Proceedings Article | 25 August 2000 Paper
Development of TMAH anisotropic etching manufacturing process for MEMS
Jiunn-Jye Tsaur, Shih-I Yang, Chen-Hsun Du, Zhongshen Lin, Cheng-Tang Huang, Cheng-Kuo Lee
Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396424
KEYWORDS: Silicon, Anisotropic etching, Manufacturing, Microelectromechanical systems, Etching, Aluminum, Ultrasonics, Wet etching, Amorphous silicon
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