Dr. Jorg Schwitzgebel Profile

Dr. Jorg Schwitzgebel

Staff Engineer at SAMSUNG Austin Semiconductor LLC

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Publications (2)

Proceedings Article | 20 March 2020 Presentation + Paper

Using e-Beam inspection and overlay as tool for identifying process weaknesses in semiconductor processing

Kwame Owusu-Boahen, Suraj Patil, Arun Vijayakumar, Alex Pate, Carl Han, Jorg Schwitzgebel, Chulwoo Kim, David Moreau

Proceedings Volume 11325, 113251V (2020) https://doi.org/10.1117/12.2551656

KEYWORDS: Semiconducting wafers, Inspection, Overlay metrology, Semiconductor manufacturing, Transmission electron microscopy, Manufacturing, Defect detection, Wafer testing, Semiconductors, Lithography

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Proceedings Article | 24 March 2006 Paper

An integrated solution for photomask manufacturing, handling, and storage at 65 nm and below

Jörg Schwitzgebel, Guangming Xiao, Barry Rockwell, Sammy Nozaki, Ali Darvish, Chris Wu

Proceedings Volume 6152, 61523H (2006) https://doi.org/10.1117/12.657887

KEYWORDS: Inspection, Particles, Photomasks, Manufacturing, System integration, Control systems, Sensors, Reticles, Robotics, Glasses

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