Mr. Lin Huang Profile

Lin Huang

at China Academy of Engineering Physics

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Publications (1)

Proceedings Article | 19 November 2021 Presentation + Paper

In-situ cleaning organic contaminants on SiO2 sol-gel antireflection film by low-pressure air plasma

Yuhai Li, Qingshun Bai, Rongqi Shen, Peng Zhang, Lihua Lu, Xiaodong Yuan, Xinxiang Miao, Wei Han, Hao Liu, Lin Huang, Caizhen Yao

Proceedings Volume 11910, 1191017 (2021) https://doi.org/10.1117/12.2599668

KEYWORDS: Plasma, Sol-gels, Optical components, Transmittance, Oxygen, Contamination, Natural surfaces, Chemical reactions, Antireflective coatings, Carbon

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