Mr. Martin Weinhart Profile

Martin Weinhart

at EV Group

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Maskless exposure of die annotations and image sensor patterns employing 7th generation RGB resists

K. Varga, M. Weinhart, R. Holly, T. Zenger, B. Považay, F. Bögelsack, A. Spitzer, T. Uhrmann, H. Takishita, Y. Taguchi, J. Koch, M. Schicke

Proceedings Volume 12956, 129560B (2024) https://doi.org/10.1117/12.3010156

KEYWORDS: Optical lithography, Semiconducting wafers, Distortion, RGB color model, Optical alignment, Image sensors, Semiconductors, Metals, Matrices, Sensors

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