In this study, we fabricated bolometer-type uncooled infrared focal plane allays (IRFPAs) of 640 × 480 pixels with high-purity semi-conducting single-walled carbon nanotubes (SWCNTs) as detection materials for the first time. The thermal isolation structure of the IRFPAs for high responsivity was realized by creating a cavity between the contact electrode and the infrared detection part and by connecting them with beam wiring. The infrared detection part was formed in the order of SiNx film, semiconducting SWCNT network film, SiO2 film, and SiNx film from the bottom. Especially the SWCNT network film was only formed by a printing process except for the fabrication process in micro electro mechanical systems (MEMS). Here, our semi-conducting SWCNTs, which is a dispersion containing a nonionic surfactant, formed a high-density film with locally-oriented structure by the coating process. The responsivity and thermal time constant of typical element in long-wave IR region showed over 105 (V/W) @0.2 V and 5 ms, respectively. Assuming the thermal conductance and infrared absorption rate, temperature coefficient of resistance (TCR) was estimated as above -5%/K. The TCR value was similar with that of semi-conducting SWCNT network film prepared on Si substrate and about three times larger than that of conventional vanadium oxide film. Therefore, we found that semi-conducting SWCNTs become a promising bolometer material that can achieve high sensitivity.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.