Mr. Md Hazwani Khairy Profile

Md Hazwani Khairy

at A*STAR Institute of Microelectronics

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Author

Publications (3)

Proceedings Article | 11 March 2024 Presentation + Paper

Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society

Doris K. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith Wee Yi Koh, Linfang Xu, Kristel Pei Xuan Wee, Chong Pei Ho, Jia Sheng Goh, Qingxin Zhang

Proceedings Volume 12885, 128850Z (2024) https://doi.org/10.1117/12.3021874

KEYWORDS: Pyroelectric detectors, Signal detection, Sensors, Gas sensors, Sustainability, Thermal sensing, Hydrogen, Gases, CMOS sensors

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Proceedings Article | 17 March 2023 Poster + Paper

Reduction of Ge-on-Si waveguide propagation loss by laser and hydrogen annealing

Leh Woon Lim, Andrew Whye Keong Fong, Rachel Chen Fang Ang, Roth Qin Gui Voo, Justin Nian Hong Teh, Md Hazwani Khairy Md Husni, Hong Cai, Landobasa Y. Tobing, Nanxi Li, Surasit Chung, Lennon Yao Ting Lee

Proceedings Volume 12424, 1242414 (2023) https://doi.org/10.1117/12.2649846

KEYWORDS: Annealing, Waveguides, Wave propagation, Hydrogen, Germanium, Silicon, Quantum cascade lasers, Mid-IR, Crystals

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Proceedings Article | 13 March 2023 Presentation + Paper

On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Proceedings Volume 12426, 124260H (2023) https://doi.org/10.1117/12.2650363

KEYWORDS: Sensors, Pyroelectric detectors, Microelectromechanical systems, Gas sensors, Carbon dioxide, Pyroelectricity, CMOS sensors, Temperature metrology, Environmental monitoring

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