Mr. Nagase Norimasa Profile

Nagase Norimasa

at Fujitsu Ltd

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Publications (2)

Proceedings Article | 28 July 2014 Paper

Study of hotspot repair using cellular automata method

Norimasa Nagase, Kanji Takeuchi, Mitsuo Sakurai, Takahisa Itoh, Tomoyuki Okada

Proceedings Volume 9256, 92560V (2014) https://doi.org/10.1117/12.2067112

KEYWORDS: Optical proximity correction, Optical filters, Lithography, Image filtering, Binary data, Complex systems, Light, Semiconductor manufacturing, Model-based design, Image enhancement

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Proceedings Article | 14 May 2007 Paper

Study of hot spot detection using neural networks judgment

Norimasa Nagase, Kouichi Suzuki, Kazuhiko Takahashi, Masahiko Minemura, Satoshi Yamauchi, Tomoyuki Okada

Proceedings Volume 6607, 66071B (2007) https://doi.org/10.1117/12.728959

KEYWORDS: Neural networks, Optical proximity correction, Lithography, Image classification, Optics manufacturing, Optical lithography, Machine learning, Feature extraction, Raster graphics

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