Mr. Pengfei Xu Profile

Pengfei Xu

at imec

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Publications (1)

Proceedings Article | 15 March 2023 Presentation + Paper

Imec silicon photonics platforms: performance overview and roadmap

F. Ferraro, P. De Heyn, M. Kim, N. Rajasekaran, M. Berciano, G. Muliuk, D. Bode, G. Lepage, S. Janssen, R. Magdziak, J. De Coster, H. Kobbi, S. Lardenois, N. Golshani, L. Shiramin, C. Marchese, S. Rajmohan, S. Nadarajan, N. Singh, S. Radhakrishnan, A. Tsiara, P. Xu, A. Karagoz, D. Yudistira, M. Martire, A. Shahar, M. Chakrabarti, D. Velenis, W. Guo, A. Miller, Kristof Croes, S. Balakrishnan, P. Verheyen, Y. Ban, J. Van Campenhout, P. Absil

Proceedings Volume 12429, 1242909 (2023) https://doi.org/10.1117/12.2650579

KEYWORDS: Silicon nitride, Silicon, Low pressure chemical vapor deposition, Waveguides, Silicon photonics, Semiconducting wafers, Tunable filters, Plasma enhanced chemical vapor deposition, Integrated optics, Germanium

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