Unspecified Sejung Ham Profile

Sejung Ham

at SK Hynix Inc

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Device overlay root cause process detection using patterned wafer geometry information

Sejung Ham, Youngkwang Song, Cheolwoo Lee, Mingyu Kim, Minsung Hyun, Sunghyun Park, Moonsoup Kim, Jeonghoon Lee, Nanglyeom Oh, Sunglyul Park, Dongsub Choi

Proceedings Volume 12955, 129551D (2024) https://doi.org/10.1117/12.3008290

KEYWORDS: Semiconducting wafers, Overlay metrology, Optical alignment, Vacuum chambers, Lithography, Scanners, Optical parametric oscillators, Process control, Error analysis, 3D metrology

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Proceedings Article | 27 April 2023 Poster + Paper

Effective tool induced shift (eTIS) for determining the total measurement uncertainty (TMU) in overlay metrology

Hyunsok Kim, Ikhyun Jeong, Baikkyu Hong, Sejung Ham, Dongsu Kim, Dongsuk Lim, Kangmin Lee, Jeongpyo Lee, Minho Jung, Nanglyeom Oh, Dongsub Choi, Hedvi Spielberg, Ohad Bachar

Proceedings Volume 12496, 124963O (2023) https://doi.org/10.1117/12.2670420

KEYWORDS: Semiconducting wafers, Metrology, Calibration, Overlay metrology, Measurement uncertainty, Optical parametric oscillators, Advanced process control, Time metrology, Reproducibility, Optical lithography

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