Dr. Shigeki Hattori Profile

Dr. Shigeki Hattori

at Toshiba Corp

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Publications (2)

Proceedings Article | 26 March 2010 Paper

High resolution positive-working molecular resist attached with alicyclic acid-leaving group

Arisa Yamada, Shigeki Hattori, Satoshi Saito, Koji Asakawa, Takeshi Koshiba, Tetsuro Nakasugi

Proceedings Volume 7639, 76390S (2010) https://doi.org/10.1117/12.851392

KEYWORDS: Etching, Lithography, Molecules, Resistance, Scanning electron microscopy, Line width roughness, Oxygen, Quantum efficiency, Photoresist processing, Polymers

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Proceedings Article | 26 March 2008 Paper

Novel molecular resist based on an amorphous truxene derivative

Shigeki Hattori, Satoshi Saito, Koji Asakawa, Takeshi Koshiba, Tetsuro Nakasugi

Proceedings Volume 6923, 69230J (2008) https://doi.org/10.1117/12.770944

KEYWORDS: Molecules, Scanning electron microscopy, Silicon, Lithography, Electron beams, Line edge roughness, Thin films, Microscopes, Solids, Crystals

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