Ms. Shu-Fang Chen Profile

Shu-Fang Chen

at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (3)

Proceedings Article | 1 April 2013 Paper

Balancing lithographic performance and resist outgassing in EUV resists

Shu-Hao Chang, Shu-Fang Chen, Ying-Yu Chen, Ming-Chin Chien, Shang-Chieh Chien, Tzu-Lih Lee, Jack J. Chen, Anthony Yen

Proceedings Volume 8679, 86790O (2013) https://doi.org/10.1117/12.2010794

KEYWORDS: Contamination, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Line width roughness, Semiconducting wafers, Scanners, Ruthenium, Polymers, Carbon

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Proceedings Article | 19 March 2012 Paper

Contrast improvement with balanced diffusion control of PAG and PDB

S. Chen, L. Chang, Y. Chang, C. Huang, C. Chang, Y. Ku

Proceedings Volume 8325, 83250O (2012) https://doi.org/10.1117/12.915802

KEYWORDS: Polymers, Diffusion, Line width roughness, Optics manufacturing, Scattering, Printing, Semiconductor manufacturing, Resolution enhancement technologies, Inspection, Immersion lithography

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Proceedings Article | 30 March 2010 Paper

Resist residue removal using UV ozone treatment

Shu-Fang Chen, Ching-Yu Chang, Yao-Ching Ku

Proceedings Volume 7639, 76391A (2010) https://doi.org/10.1117/12.849449

KEYWORDS: Ultraviolet radiation, Polymers, Etching, Ozone, Photoresist processing, Semiconducting wafers, Natural surfaces, Lithography, Wet etching, Molecules

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