Digital holographic microscopy is a new real-time 3D measurement technique, which is designed and installed by optical holography, microscopic imaging and optical information processing. Compared with the traditional optical holography, CCD camera is used instead of the conventional silver to record holograms, and it is reconstructed by digital reference wave-front. Firstly, based on optical holographic principle, the optical system of digital holographic microscopy is designed. And then, the technical parameter of the key optical elements is analyzed, and its whole mechanical fixed structure is designed using SOLIDWORKS software. Lastly, the experiment device is installed, and the steady holograms are obtained by CCD camera. Based on the reliable digital holograms, the digital reconstructed software is developed by Visual C++ 2010. And the corresponding programming modules are debugged, for example FFT computing module, angular spectrum method module, 3D surface display module, and so on. Finally, micro-lens array is used as contrast experiment sample under-test, the perfect phase data can be obtained through the developed hardware and software of digital holographic microscopy, and also, well intensity image of sinusoidal grating, scratch, cicada moth and onion epidermal is acquired in the trial experiments.
In high-precision vertical large-caliber flat interferometry, the gravity deformation of the reference flat will lead to a large error of the surface shape measured. Based on the analysis of the finite element method, this paper combines the three flats test method with Zernike polynomial fitting to compensate and calibrate the error of the reference flat. For the diameter of 300 mm and a thickness of 90 mm of the fused silica reference flat, the results of analysis show that the PV deformation under the T-bracing is 0.021 λ. (λ = 632.8nm). The simulation test result of the influence of deformation on the three-flats test shows that the reference flat the gravity deformation not only affects the detection of self surface, but also has a great influence on the surface detection results of the undeformed flat. And the PV of the surface shape detection results residual is close to 0.011λ. In the end, the new calibration method base on compensate reference deformation for three flats test was proposed, and the validity was verified by simulation.
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