Prof. Teodor P. Gotszalk Profile

Prof. Teodor P. Gotszalk

at Wroclaw Univ. of Science and Technology

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 13 June 2022 Presentation

Presentation

Multi-purpose active probes in atomic resolution lithography, near field spectroscopy and field emission lithography

Tito Busani, Ivo Rangelow, Teodor Gotszalk, Mahmoud Behazirad

Proceedings Volume PC12054, PC120540Q (2022) https://doi.org/10.1117/12.2621979

KEYWORDS: Lithography, Gallium nitride, Near field scanning optical microscopy, Scanning tunneling microscopy, Field spectroscopy, Scanning probe microscopy, Near field, Emission spectroscopy, Atomic force microscopy, Spectroscopy

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Proceedings Article | 10 November 2016 Paper

Paper

Innovative multi-cantilever array sensor system with MOEMS read-out

F. Ivaldi, T. Bieniek, P. Janus, P. Grabiec, W. Majstrzyk, D. Kopiec, T. Gotszalk

Proceedings Volume 10161, 1016102 (2016) https://doi.org/10.1117/12.2244154

KEYWORDS: Sensors, Microopto electromechanical systems, Micromirrors, Calibration, Electronics, Head, Laser sources, System integration, Signal to noise ratio, Data acquisition

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Proceedings Article | 16 September 2014 Paper

Paper

Shear force microscopy using piezoresistive cantilevers in surface metrology

Teodor Gotszalk, Daniel Kopiec, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, Ivo Rangelow

Proceedings Volume 9236, 92360A (2014) https://doi.org/10.1117/12.2066247

KEYWORDS: Metrology, Atomic force microscopy, Actuators, Microscopy, Calibration, Sensors, Wheatstone bridges, Standards development, Optical fibers, Silicon

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Proceedings Article | 16 September 2014 Paper

Paper

Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever

Paweł Janus, Piotr Grabiec, Andrzej Sierakowski, Teodor Gotszalk, Maciej Rudek, Daniel Kopiec, Wojciech Majstrzyk, Guillaume Boetsch, Bernd Koehler

Proceedings Volume 9236, 92360R (2014) https://doi.org/10.1117/12.2066240

KEYWORDS: Silicon, Sensors, Wheatstone bridges, Optical lithography, Microscopy, Electronics, Platinum, Semiconducting wafers, Bridges, Amplifiers

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Proceedings Article | 14 April 2014 Paper

Paper

Parallel SPM cantilever arrays for large area surface metrology and lithography

Teodor Gotszalk, Tzvetan Ivanov, Ivo Rangelow

Proceedings Volume 9050, 90500W (2014) https://doi.org/10.1117/12.2046348

KEYWORDS: Sensors, Scanning probe microscopy, Actuators, Metrology, Resistance, Piezoresistive sensors, Metals, Wheatstone bridges, Lithography, Silicon

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Proceedings Article | 25 July 2013 Paper

Paper

Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Magdalena Ekwińska, Piotr Kunicki, Tomasz Piasecki, Paweł Janus, Krzysztof Domański, Tomasz Bieniek, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 89021X (2013) https://doi.org/10.1117/12.2031093

KEYWORDS: Manufacturing, Microelectromechanical systems, Capacitance, Optical testing, Control systems, Nanoelectromechanical systems, Electrodes, Polarization, Silica, Neodymium

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Proceedings Article | 25 July 2013 Paper

Paper

Miniature plasma jet for mass spectrometry

Michał Babij, Teodor Gotszalk, Zbigniew Kowalski, Karol Nitsch, Jerzy Silberring, Marek Smoluch

Proceedings Volume 8902, 890208 (2013) https://doi.org/10.1117/12.2029792

KEYWORDS: Plasma, Atmospheric plasma, Electrodes, Mass spectrometry, Dielectrics, Capillaries, Spectroscopy, Glasses, Plasma generation, Ionization

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Proceedings Article | 25 July 2013 Paper

Paper

Microfabricated support structures for investigations of mechanical and electrical graphene properties

Krzysztof Gajewski, Teodor Gotszalk, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec

Proceedings Volume 8902, 89020G (2013) https://doi.org/10.1117/12.2030886

KEYWORDS: Graphene, Nanostructures, Photomasks, Photoresist materials, Microfabrication, Silicon, Chemical vapor deposition, Silica, Computer aided design, Lithography

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Proceedings Article | 25 July 2013 Paper

Paper

Fabrication and measurement of micromechanical bridge structures for mass change detection

Magdalena Moczała, Andrzej Sierakowski, Rafał Dobrowolski, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 89021W (2013) https://doi.org/10.1117/12.2031053

KEYWORDS: Bridges, Silicon, Nanoelectromechanical systems, Microelectromechanical systems, Atomic force microscopy, Molecular bridges, Crystals, Reactive ion etching, Anisotropic etching, Aluminum

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Proceedings Article | 25 July 2013 Paper

Paper

Dynamic method of calibration and examination piezoresistive cantilevers

Andrzej Sierakowski, Daniel Kopiec, Magdalena Ekwińska, Tomasz Piasecki, Rafał Dobrowolski, Mariusz Płuska, Krzysztof Domański, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 890220 (2013) https://doi.org/10.1117/12.2031522

KEYWORDS: Wheatstone bridges, Silicon, Calibration, Interferometers, Interferometry, Dielectric spectroscopy, Plasma etching, Electronics, Image processing, Diffusion

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Proceedings Article | 25 July 2013 Paper

Paper

Microcontact printing technology as a method of fabrication of patterned self-assembled monolayers for application in nanometrology

Piotr Pałetko, Magdalena Moczała, Paweł Janus, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 89021Z (2013) https://doi.org/10.1117/12.2031273

KEYWORDS: Molecular self-assembly, Manufacturing, Printing, Silica, Molecular electronics, Gold, Silicon, Atomic force microscopy, Molecules, Self-assembled monolayers

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Proceedings Article | 25 July 2013 Paper

Paper

Silicon nanowires reliability and robustness investigation using AFM-based techniques

Tomasz Bieniek, Grzegorz Janczyk, Paweł Janus, Piotr Grabiec, Marek Nieprzecki, Grzegorz Wielgoszewski, Magdalena Moczała, Teodor Gotszalk, Elizabeth Buitrago, Montserrat Badia, Adrian Ionescu

Proceedings Volume 8902, 89022L (2013) https://doi.org/10.1117/12.2031229

KEYWORDS: Atomic force microscopy, Silicon, Reliability, Scanning electron microscopy, Biosensing, Nanostructures, Nanolithography, Field effect transistors, Sensing systems, Nanowires

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Proceedings Article | 17 April 2012 Paper

Paper

Optimization method of photolithography process by means of atomic force microscopy

Andrzej Sierakowski, Paweł Janus, Daniel Kopiec, Konrad Nieradka, Krzysztof Domanski, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8352, 83520B (2012) https://doi.org/10.1117/12.918024

KEYWORDS: Atomic force microscopy, Photoresist materials, Optical lithography, Maskless lithography, System integration, Head, Image processing, Photoresist developing, Scanners, Error analysis

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Proceedings Article | 4 November 2002 Paper

Paper

Thermal imaging of microwave power GaAs-FET with scanning thermal nanoprobe

Mojtaba Joodaki, Pawel Janus, Teodor Gotszalk, Guenter Kompa, Klaus Edinger, Ivo Rangelow

Proceedings Volume 4809, (2002) https://doi.org/10.1117/12.450989

KEYWORDS: Thermography, Temperature metrology, Microwave radiation, Transistors, Infrared radiation, Diodes, Near field, Spatial resolution, Liquid crystals, Nanoprobes

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Proceedings Article | 23 September 1996 Paper

Paper

Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

Ivo Rangelow, Feng Shi, Peter Hudek, Teodor Gotszalk, Piotr Grabiec, Piotr Dumania

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251232

KEYWORDS: Silicon, Etching, Sensors, Atomic force microscopy, Photoresist materials, Plasma etching, Semiconducting wafers, Plasma, Wheatstone bridges, Resistors

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Proceedings Article | 13 September 1996 Paper

Paper

Lateral force microscopy using cantilevers with integrated Wheatstone bridge piezoresistive deflection sensor

Teodor Gotszalk, Ivo Rangelow, Piotr Dumania, Piotr Grabiec

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250958

KEYWORDS: Sensors, Wheatstone bridges, Atomic force microscopy, Chromium, Modulation, Microscopy, Microscopes, Signal detection, Bridges, Atomic force microscope

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Proceedings Article | 13 September 1996 Paper

Paper

Cantilever with integrated Wheatstone bridge piezoresistive deflection sensor: analysis of force interaction measurement sensitivity

Teodor Gotszalk, Ivo Rangelow, Piotr Dumania, Piotr Grabiec

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250959

KEYWORDS: Wheatstone bridges, Sensors, Atomic force microscopy, Bridges, Silicon, Resistors, Scanning probe microscopy, Quartz, Integrated circuits, Indium nitride

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Proceedings Article | 8 April 1996 Paper

Paper

AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode

Teodor Gotszalk, R. Linnemann, Ivo Rangelow, Piotr Dumania, Piotr Grabiec

Proceedings Volume 2780, (1996) https://doi.org/10.1117/12.238192

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Showing 5 of 18 publications

Conference Committee Involvement (1)

Smart Sensors, Actuators, and MEMS VII

4 May 2015 | Barcelona, Spain

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