Dr. Tohru Kawamura Profile

Dr. Tohru Kawamura

at Osaka Univ

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Author

Publications (5)

Proceedings Article | 20 September 2004 Paper

Simulations on laser ablation and its applications

Hiroyuki Furukawa, Tohru Kawamura, Atsushi Sunahara, Takeshi Nishikawa, Katsunobu Nishihara, Chiyoe Yamanaka

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.549105

KEYWORDS: Laser ablation, Electrons, Absorption, Optical simulations, Liquids, Plasma, Ions, Extreme ultraviolet, Chemical species, Particles

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Proceedings Article | 20 May 2004 Paper

Properties of EUV emissions from laserproduced tin plasmas

Yoshinori Shimada, Hiroaki Nishimura, Kazuhisa Hashimoto, Michiteru Yamaura, Keisuke Shigemori, Mitsuo Nakai, Shinsuke Fujioka, Shigeaki Uchida, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Keiji Nagai, Takayoshi Norimatsu, Toru Kawamura, Atsushi Sunahara, Katsunobu Nishihara, Noriaki Miyanaga, Masahiro Nakatsuka, Yasukazu Izawa, Chihiro Yamanaka

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534959

KEYWORDS: Extreme ultraviolet, Tin, Plasmas, Spectroscopy, Spherical lenses, Laser applications, Lithography, Grazing incidence, Laser energy, Calibration

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Proceedings Article | 20 May 2004 Paper

Theoretical simulation of extreme UV radiation source for lithography

Kazumi Fujima, Katsunobu Nishihara, Toru Kawamura, Hiroyuki Furukawa, Takashi Kagawa, Fumihiro Koike, Richard More, Masakatsu Murakami, Takeshi Nishikawa, Akira Sasaki, Atsushi Sunahara, Vasillii Zhakhovskii, Takashi Fujimoto, Hajime Tanuma

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534989

KEYWORDS: Ions, Extreme ultraviolet, Plasmas, Electrons, Tin, Lithography, Solids, Ultraviolet radiation, Opacity, Xenon

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Proceedings Article | 20 May 2004 Paper

Estimation of emission efficiency for laser-produced EUV plasmas

Toru Kawamura, Atsushi Sunahara, Kouhei Gamada, Kazumi Fujima, Fumihiro Koike, Hiroyuki Furukawa, Takeshi Nishikawa, Akira Sasaki, Takashi Kagawa, Richard More, Takako Kato, Masakatsu Murakami, Vasillii Zhakhovskii, Hajime Tanuma, Takashi Fujimoto, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shigeaki Uchida, Chiyoe Yamanaka, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Mitsuo Nakai, Keisuke Shigemori, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535031

KEYWORDS: Extreme ultraviolet, X-rays, Plasmas, Tin, Electrons, Ions, Opacity, Laser development, Solids, Pulsed laser operation

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Proceedings Article | 11 January 2000 Paper

X-ray spectroscopic analysis of the influence of low-modal nonuniformity on the formation of a hot spark

Yoshihiro Ochi, Mitsuhiro Fukao, J. Sunahara, Hiroaki Nishimura, Kazuhisa Fujita, Tohru Kawamura, Hiroyuki Shiraga, Noriaki Miyanaga, Hiroshi Azechi, Hideaki Takabe, Kunioki Mima, Tatsuhiko Yamanaka, Sadao Nakai, Randolf Butzbach, Ingo Uschmann, Eckhart Foerster

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375142

KEYWORDS: X-rays, Spectroscopy, Fusion energy, Argon, Picosecond phenomena, Laser irradiation, Spectrum analysis, X-ray imaging, Diagnostics, Plasma

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