Dr. Tomoya Oshikiri Profile

Dr. Tomoya Oshikiri

Researcher at Mitsubishi Rayon Co Ltd

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Publications (1)

Proceedings Article | 16 April 2011 Paper

Primary structure control of ArF resist polymer by regulating feed rate of monomers and initiator

Tomoya Oshikiri, Atsushi Yasuda, Keisuke Kato, Shin-ichi Maeda

Proceedings Volume 7972, 79721U (2011) https://doi.org/10.1117/12.879421

KEYWORDS: Polymers, Polymerization, Homogenization, Scanning probe microscopy, Lithography, Photoresist materials, Polymer thin films, Semiconducting wafers, Photoresist developing, Aluminum

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