Mr. Weixuan Zeng Profile

Weixuan Zeng

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Publications (2)

Proceedings Article | 10 December 2024 Paper

Integration of deep learning for nonlinear spectral decomposition of in situ interfaces analysis

Jingyu Chen, Puzhen Li, Yudan Su, Weixuan Zeng, Shisheng Xiong

Proceedings Volume 13423, 134231P (2024) https://doi.org/10.1117/12.3055530

KEYWORDS: Sum frequency generation, Interfaces, Deep learning, Thin films, Spectroscopy, Signal intensity, Signal attenuation, Polystyrene, Optical surfaces, Vibration

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Proceedings Article | 10 December 2024 Paper

Measurement and analysis algorithm for sub-30 nm patterns of hexagonal arrays in microphotography

Shengru Niu, Yiming Xu, Jing Zhou, Yichen Zhang, Weixuan Zeng, Shisheng Xiong

Proceedings Volume 13423, 134230P (2024) https://doi.org/10.1117/12.3052918

KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Manufacturing, Contour extraction, Error analysis, Statistical analysis, Lithography, Optical lithography, Image segmentation, Analytical research

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