Xiang Fang
at Siemens EDA
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 June 2022 Presentation + Paper
Proceedings Volume 12052, 120520Q (2022) https://doi.org/10.1117/12.2614118
KEYWORDS: Optimization (mathematics), Calibration, Data modeling, Optical proximity correction, Binary data, Performance modeling, Genetic algorithms, Process modeling, Computer simulations, Precision calibration

Proceedings Article | 23 August 2021 Paper
Proceedings Volume 11908, 119080R (2021) https://doi.org/10.1117/12.2597680

Proceedings Article | 12 June 2018 Paper
Xiang Fang, Shou-Yuan Ma, Chien-Nan Lin, Hsu-Tang Liu, Chuan-Chun Lee, Chuen-Huei Yang, I-Y. Chang, Erwin Deng, Ming-Feng Shen, Min-Ying Lu, Ling-Chieh Lin, Hung-Yueh Liao, Elven Huang, Jonathan Muirhead
Proceedings Volume 10807, 108070L (2018) https://doi.org/10.1117/12.2323956
KEYWORDS: Design for manufacturing, Databases, Rule based systems, Semiconducting wafers, System identification, Visualization, Photomasks, Lutetium, Microelectronics, Design for manufacturability

Proceedings Article | 13 July 2017 Paper
Jian-Cheng Chen, Min-Ying Lu, Xiang Fang, Ming-Feng Shen, Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell
Proceedings Volume 10454, 104540G (2017) https://doi.org/10.1117/12.2278691
KEYWORDS: Reticles, Databases

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