Prof. Yung-Chiang Ting Profile

Prof. Yung-Chiang Ting

Assistant Professor at Far East Univ

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Author

Publications (10)

Proceedings Article | 21 March 2017 Paper

Inspection and fabrication of nano-imprint stamp using electron and ion dual beam system

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 10144, 1014413 (2017) https://doi.org/10.1117/12.2257398

KEYWORDS: Photomasks, Electron beam lithography, Etching, Metals, Dielectrics, Inspection, Ions, Electron beams

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Proceedings Article | 1 April 2016 Paper

Nano-imprint lithography using poly (methyl methacrylate) (PMMA) and polystyrene (PS) polymers

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 9777, 97771H (2016) https://doi.org/10.1117/12.2218594

KEYWORDS: Polymethylmethacrylate, Polymers, Nanoimprint lithography, Picosecond phenomena, Lithography, Electron beam lithography, Coating, Glasses, Electron beams, Printing

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Proceedings Article | 31 March 2014 Paper

Novel wafer stepper with violet LED light source

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 9052, 90522G (2014) https://doi.org/10.1117/12.2045738

KEYWORDS: Semiconducting wafers, Light emitting diodes, Light sources, Photomasks, Lithography, Photoresist materials, Printing, Lamps, Microelectromechanical systems, Mercury

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Proceedings Article | 21 March 2012 Paper

Fabrication nanopillars pattern on PDMS using anodic aluminum oxide film as template

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 8323, 83232H (2012) https://doi.org/10.1117/12.916456

KEYWORDS: Aluminum, Scanning electron microscopy, Optoelectronic devices, Lithography, Nanolithography, Nanostructures, Image processing, Photomicroscopy, Semiconductors, Field emission displays

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Proceedings Article | 19 March 2012 Paper

Gray-level 3D resist process and its application

Yung-Chiang Ting, Shyi-Long Shy, Andy Liu, Cheng-San Wu, C. Chen

Proceedings Volume 8325, 83252E (2012) https://doi.org/10.1117/12.915702

KEYWORDS: Photoresist processing, Fresnel lenses, Electron beams, Optical alignment, Semiconducting wafers, LCDs, Electron beam lithography, Coating, Prisms, Solar concentrators

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Proceedings Article | 1 March 2011 Paper

Synthesis of well-aligned and highly density nanopore arrays with the assistance of ultrasonic

Yung-Chiang Ting, Shyi-Long Shy, Chung-An Wang

Proceedings Volume 7947, 79470X (2011) https://doi.org/10.1117/12.873123

KEYWORDS: Ultrasonics, Aluminum, Oxides, Scanning electron microscopy, Image processing, Interfaces, Atomic force microscopy, Metals, Nanostructures, Nanolithography

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Proceedings Article | 14 December 2009 Paper

Green binary and phase shifting mask

S. Shy, Chao-Sin Hong, Cheng-San Wu, S. Chen, Hung-Yu Wu, Yung-Chiang Ting

Proceedings Volume 7520, 75202D (2009) https://doi.org/10.1117/12.836228

KEYWORDS: Photomasks, Binary data, Silicon, Chromium, Image analysis, Lithography, Thin films, Electron beam lithography, Phase shifting, Nickel

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Proceedings Article | 20 May 2006 Paper

Pore size control of alumina membrane mask

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 6283, 62833I (2006) https://doi.org/10.1117/12.681837

KEYWORDS: Etching, Aluminum, Photomasks, Image processing, Scanning electron microscopy, Oxides, Wet etching, Nanostructures, Oxidation, Nanowires

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Proceedings Article | 20 May 2006 Paper

Fabrication of nanoimprint stamp and its application

Yung-Chiang Ting, Shyi-Long Shy

Proceedings Volume 6283, 62833H (2006) https://doi.org/10.1117/12.681836

KEYWORDS: Nanoimprint lithography, Nanotechnology, Electron beams, Nanolithography, Electron beam lithography, Polymers, Data storage, Microfluidics, Semiconductors, Biotechnology

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Proceedings Article | 20 August 2004 Paper

Nanofabrication of nanopattern and microdevices using contact/proximity lithography

Yung-Chiang Ting, Shyi-Long Shy, Ming-Chun Lee, Bau-Tong Dai

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557750

KEYWORDS: Photomasks, Lithography, Chromium, Etching, Wet etching, Glasses, Nanofabrication, Light sources, Printing, Submicron lithography

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Showing 5 of 10 publications

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