Mr. Guillaume Marinier Profile

Guillaume Marinier

at Univ de Rouen

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Publications (2)

Proceedings Article | 24 April 2003 Paper

Dynamic characterization of SiO₂-Au microcantilevers using Michelson interferometer

Guillaume Marinier, Stefan Dilhaire, Luis Patino Lopez, Mohamed Benzohra

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498827

KEYWORDS: Michelson interferometers, Photodetectors, Beam splitters, Phase shifts, Microsystems, Microelectromechanical systems, Transducers, Amplifiers, Thin films, Actuators

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Proceedings Article | 24 April 2003 Paper

Dynamic characterization of passive microstructures (SiO₂-Au microcantilevers) under a controlled environment

Guillaume Marinier, Eric Joubert, Mohamed Benzohra, Mohamed Ketata

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498829

KEYWORDS: Manufacturing, Tapered optical fibers, Fiber lasers, Silicon, Carbon dioxide lasers, Light sources and illumination, Actuators, Microsystems, Gold, Wet etching

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