CONFERENCE PROCEEDINGS
Advanced Search
Hojin Kang
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 10 April 2024 Poster
Low global warming C5F10O isomers for plasma atomic layer etching and reactive ion etching of SiO2 and Si3N4
Jihye Kim, Hojin Kang, Yongsun Cho, Junsik Hong, Heeyeop Chae
Proceedings Volume 12958, 129580S (2024) https://doi.org/10.1117/12.3014577
KEYWORDS: Atomic layer etching, Silica, Plasma, Plasma etching, Etching, Climate change, X-ray photoelectron spectroscopy, Windows, Plasma generation, Ions
Proceedings Article | 30 April 2023 Presentation
Anisotropic atomic layer etching of ruthenium with fluorination using fluorocarbon and hydrofluorocarbon
Yongjae Kim, Hojin Kang, Heeyeop Chae
Proceedings Volume PC12499, PC124990E (2023) https://doi.org/10.1117/12.2657412
KEYWORDS: Plasma, Ruthenium, Etching, Argon, Anisotropic etching, Ions, Focus stacking software, Copper, Plasma etching, Metals
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top