Dr. Maik Simon Profile

Dr. Maik Simon

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Publications (1)

Proceedings Article | 5 October 2023 Paper

Fabrication of gate electrodes for scalable quantum computing using CMOS industry compatible e-beam lithography and numerical simulation of the resulting quantum device

Varvara Brackmann, Malte Neul, Michael Friedrich, Wolfram Langheinrich, Maik Simon, Pascal Muster, Sebastian Pregl, Arne Demmler, Norbert Hanisch, Maximilian Lederer, Katrin Zimmermann, Jan Klos, Felix Reichmann, Yuji Yamamoto, Marcus Wislicenus, Claus Dahl, Lars Schreiber, Hendrik Bluhm, Benjamin Lilienthal-Uhlig

Proceedings Volume 12802, 128020F (2023) https://doi.org/10.1117/12.2675943

KEYWORDS: Quantum spin, Quantum gates, Electrodes, Quantum communications, Electron beam lithography, Etching, Quantum processes, Fabrication, Semiconducting wafers, Silicon

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