Pavel S. Sattarov
at JSC Molecular Electronics Research Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121570E (2022) https://doi.org/10.1117/12.2624084
KEYWORDS: Metals, Silicon, Oxides, Nickel, Dielectrics, Switching, Sputter deposition, Platinum, Copper, Chemical species

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