Valery Plaksin
at JSC Molecular Electronics Research Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121571B (2022) https://doi.org/10.1117/12.2624164
KEYWORDS: Copper, Resistance, Tin, Tantalum, Chemical vapor deposition, Silicon, Semiconducting wafers, Titanium, Diffusion, Remote sensing

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