Dr. Alexandra C. Barberet Profile

Dr. Alexandra C. Barberet

at GlobalFoundries

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 14 March 2006 Paper

Meeting critical gate linewidth control needs at the 65 nm node

Arpan Mahorowala, Scott Halle, Allen Gabor, William Chu, Alexandra Barberet, Donald Samuels, Amr Abdo, Len Tsou, Wendy Yan, Seiji Iseda, Kaushal Patel, Bachir Dirahoui, Asuka Nomura, Ishtiaq Ahsan, Faisal Azam, Gary Berg, Andrew Brendler, Jeffrey Zimmerman, Tom Faure

Proceedings Volume 6156, 61560M (2006) https://doi.org/10.1117/12.659427

KEYWORDS: Immersion lithography, Control systems, Reticles, Cadmium, Lithography, Optical proximity correction, Photomasks, Semiconducting wafers, Etching, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years