Prof. Frank Schmidt Profile

Prof. Frank Schmidt

CEO at JCMwave GmbH

SPIE Involvement:

Author

Publications (65)

Proceedings Article | 16 February 2017 Presentation + Paper

Resonant cavity light–emitting diodes based on dielectric passive cavity structures

N. Ledentsov, V. Shchukin, J.-R. Kropp, L. Zschiedrich, F. Schmidt

Proceedings Volume 10124, 101240O (2017) https://doi.org/10.1117/12.2253089

KEYWORDS: Dielectrics, Light emitting diodes, Semiconductors, Photonic crystals, Etching, Diodes, Distributed Bragg reflectors, Vertical cavity surface emitting lasers, Multilayers, Refractive index, Oxides, Light sources, Light, Quantum wells

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A novel design for high brightness planar technology light-emitting diodes (LEDs) and LED on-wafer arrays on absorbing substrates is proposed. The design integrates features of passive dielectric cavity deposited on top of an oxide– semiconductor distributed Bragg reflector (DBR), the p–n junction with a light emitting region is introduced into the top semiconductor λ/4 DBR period. A multilayer dielectric structure containing a cavity layer and dielectric DBRs is further processed by etching into a micrometer–scale pattern. An oxide–confined aperture is further amended for current and light confinement. We study the impact of the placement of the active region into the maximum or minimum of the optical field intensity and study an impact of the active region positioning on light extraction efficiency. We also study an etching profile composed of symmetric rings in the etched passive cavity over the light emitting area. The bottom semiconductor is an AlGaAs–AlAs multilayer DBR selectively oxidized with the conversion of the AlAs layers into AlO_x to increase the stopband width preventing the light from entering the semiconductor substrate. The approach allows to achieve very high light extraction efficiency in a narrow vertical angle keeping the reasonable thermal and current conductivity properties. As an example, a micro-LED structure has been modeled with AlGaAs-AlAs or AlGaAs-AlO_x DBRs and an active region based on InGaAlP quantum well(s) emitting in the orange spectral range at ~610 nm. A passive dielectric SiO₂ cavity is confined by dielectric Ta₂O₅/SiO₂ and AlGaAs-AlO_x DBRs. Cylindrically–symmetric structures with multiple ring patterns are modeled. It is demonstrated that the extraction coefficient of light to the air can be increased from 1.3% up to above 90% in a narrow vertical angle (full width at half maximum (FWHM) below 20°). For very small oxide–confined apertures ~100nm the narrowing of the FWHM for light extraction can be reduced down to 5°. Consequently high efficiency high brightness arrays of micro-LEDs becomes possible. For single emitters the approach is particularly interesting for oscillator strength engineering allowing high speed data transmission and for single photonics applying single quantum dot (QD) emitters and allowing >90% coupling of the emission into single mode fiber. We also note that for longer wavelength (~1300nm) QDs the thickness of the layers and surface patterns significantly increase allowing greatly reduced processing tolerances and applying further simplifications due to the possibility of using high contrast GaAs-AlO_x DBRs.

Proceedings Article | 29 April 2016 Paper

Sinusoidal gratings for optimized light management in c-Si thin-film solar cells

Klaus Jäger, Grit Köppel, Carlo Barth, Martin Hammerschmidt, Sven Herrmann, Sven Burger, Frank Schmidt, Christiane Becker

Proceedings Volume 9898, 989808 (2016) https://doi.org/10.1117/12.2225459

KEYWORDS: Silicon, Thin film solar cells, Solar cells, Thin films, Antireflective coatings, Diffraction gratings, Numerical simulations, Finite element methods, Thin film solar cells, Refractive index, Interfaces, Polarization, Maxwell's equations, Absorption

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Proceedings Article | 14 March 2016 Paper

Reconstruction of photonic crystal geometries using a reduced basis method for nonlinear outputs

Martin Hammerschmidt, Carlo Barth, Jan Pomplun, Sven Burger, Christiane Becker, Frank Schmidt

Proceedings Volume 9756, 97561R (2016) https://doi.org/10.1117/12.2212482

KEYWORDS: Photonic crystals, Electromagnetism, Finite element methods, Chemical elements, Electroluminescent displays, Silicon, Reflectivity, Solids, Resonance enhancement, Electromagnetic scattering

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Proceedings Article | 14 March 2016 Paper

Time-harmonic optical chirality in inhomogeneous space

Philipp Gutsche, Lisa Poulikakos, Martin Hammerschmidt, Sven Burger, Frank Schmidt

Proceedings Volume 9756, 97560X (2016) https://doi.org/10.1117/12.2209551

KEYWORDS: Polarization, Interfaces, Electromagnetism, Electroluminescent displays, Radio propagation, Magnetism, Wave propagation, Integrated optics, Finite element methods, Anisotropy

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Proceedings Article | 8 March 2016 Paper

Method for fast computation of angular light scattering spectra from 2D periodic arrays

Jan Pomplun, Sven Burger, Lin Zschiedrich, Philipp Gutsche, Frank Schmidt

Proceedings Volume 9778, 977839 (2016) https://doi.org/10.1117/12.2219666

KEYWORDS: Finite element methods, Electromagnetism, Computer simulations, Optical metrology, Semiconductors, Light scattering, 3D metrology, Scatterometry, Computational lithography, Numerical analysis, Silicon, Scattering, Polarization, Metrology, Maxwell's equations, Computing systems

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Proceedings Article | 4 March 2016 Paper

Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures

Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 9742, 97420M (2016) https://doi.org/10.1117/12.2212367

KEYWORDS: Maxwell equations, Transistors, Modeling, Nanostructures, Finite element methods, Optical components, Photonics, Optical properties, Error analysis, Electroluminescent displays, Maxwell's equations, Electromagnetic scattering, Fourier transforms, Computer simulations

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Proceedings Article | 4 March 2016 Paper

Direct visualization of the in-plane leakage of high-order transverse modes in vertical-cavity surface-emitting lasers mediated by oxide-aperture engineering

N. Ledentsov, V. Shchukin, J.-R. Kropp, S. Burger, F. Schmidt

Proceedings Volume 9766, 976608 (2016) https://doi.org/10.1117/12.2208909

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Visualization, Modulation, Electroluminescence, 3D modeling, Data modeling, Zinc, CCD cameras, Neodymium, Ions

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Proceedings Article | 23 September 2015 Paper

Hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures

Sven Burger, Philipp Gutsche, Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Frank Schmidt, Benjamin Wohlfeil, Lin Zschiedrich

Proceedings Volume 9630, 96300S (2015) https://doi.org/10.1117/12.2190119

KEYWORDS: Finite element methods, Electromagnetism, Absorption, Interfaces, Optical components, Maxwell's equations, Optical design, 3D equipment, Visualization, Transparent conductors

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Proceedings Article | 23 September 2015 Paper

Reduced basis method for Maxwell's equations with resonance phenomena

Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Lin Zschiedrich, Sven Burger, Frank Schmidt

Proceedings Volume 9630, 96300R (2015) https://doi.org/10.1117/12.2190425

KEYWORDS: Error analysis, Electroluminescent displays, Chemical elements, Maxwell's equations, Finite element methods, Nanophotonics, Instrument modeling, Photonic crystals, Silicon, Resonance enhancement

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Proceedings Article | 20 March 2015 Paper

Engineering of optical modes in vertical-cavity microresonators by aperture placement: applications to single-mode and near-field lasers

V. Shchukin, N. Ledentsov, J.-R. Kropp, G. Steinle, K. Choquette, S. Burger, F. Schmidt

Proceedings Volume 9381, 93810V (2015) https://doi.org/10.1117/12.2077012

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Near field optics, Near field, Refractive index, 3D modeling, Waveguides, Reflectivity, Resistance, Semiconductors

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Proceedings Article | 19 March 2015 Paper

Hp-finite element method for simulating light scattering from complex 3D structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Sven Herrmann, Frank Schmidt

Proceedings Volume 9424, 94240Z (2015) https://doi.org/10.1117/12.2085795

KEYWORDS: Light scattering, Finite element methods, Roentgenium, 3D metrology, Electromagnetism, Discretization errors, Optical metrology, Metrology, Silicon

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Proceedings Article | 4 March 2015 Paper

High-speed modulation, wavelength, and mode control in vertical-cavity surface-emitting lasers

Nikolay Ledentsov, Jörg-R. Kropp, Vitaly Shchukin, Gunther Steinle, Jarek Turkiewicz, Bo Wu, Shaofeng Qiu, Yanan Ma, Zhiyong Feng, Sven Burger, Frank Schmidt, Christoph Caspar, Ronald Freund, Kent Choquette

Proceedings Volume 9381, 93810F (2015) https://doi.org/10.1117/12.2082951

KEYWORDS: Vertical cavity surface emitting lasers, Modulation, Oxides, Optical fibers, Multimode fibers, Dielectrics, Electro optics, Dispersion, Photonic crystals, Near field

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Proceedings Article | 15 May 2014 Paper

A comparison of scattering and non-scattering anti-reflection designs for back contacted polycrystalline thin film silicon solar cells in superstrate configuration

Daniel Lockau, M. Hammerschmidt, Jan Haschke, Mark Blome, F. Ruske, F. Schmidt, B. Rech

Proceedings Volume 9140, 914006 (2014) https://doi.org/10.1117/12.2052362

KEYWORDS: Glasses, Silicon, Transmittance, Interfaces, Silica, Solar cells, Light scattering, Antireflective coatings, Scattering, Titanium dioxide

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Proceedings Article | 8 March 2014 Paper

Numerical simulation of grating couplers for mode multiplexed systems

Benjamin Wohlfeil, Sven Burger, Christos Stamatiadis, Jan Pomplun, Frank Schmidt, Lars Zimmermann, Klaus Petermann

Proceedings Volume 8988, 89880K (2014) https://doi.org/10.1117/12.2044461

KEYWORDS: Waveguides, Waveguide modes, Polarization, 3D modeling, Optical design, Light scattering, Numerical simulations, Multiplexing, Computer simulations, Scattering

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Proceedings Article | 7 March 2014 Paper

Adaptive sampling strategies for efficient parameter scans in nano-photonic device simulations

Martin Hammerschmidt, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 8980, 89801O (2014) https://doi.org/10.1117/12.2036363

KEYWORDS: 3D modeling, Solar cells, Error analysis, MATLAB, Finite element methods, Chemical elements, Nanophotonics, Metrology, Scattering, Device simulation

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Proceedings Article | 7 March 2014 Paper

Optical modelling of incoherent substrate light-trapping in silicon thin film multi-junction solar cells with finite elements and domain decomposition

Martin Hammerschmidt, Daniel Lockau, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8980, 898007 (2014) https://doi.org/10.1117/12.2036346

KEYWORDS: Glasses, Chemical elements, Finite element methods, Solar cells, Scattering, Electroluminescent displays, Light scattering, 3D modeling, Silicon, Multijunction solar cells

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Proceedings Article | 9 October 2013 Paper

Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 8880, 88801Z (2013) https://doi.org/10.1117/12.2026213

KEYWORDS: Finite element methods, Electromagnetism, Computer simulations, Metrology, Stanford Linear Collider, Silver, Near field, Sensors, Numerical analysis, Chemical elements

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Proceedings Article | 25 September 2013 Paper

Nanophotonic light trapping in polycrystalline silicon thin-film solar cells using periodically nanoimprint-structured glass substrates

Christiane Becker, Jolly Xavier, Veit Preidel, Philippe Wyss, Tobias Sontheimer, Bernd Rech, Jürgen Probst, Christoph Hülsen, Bernd Löchel, Alexei Erko, Sven Burger, Frank Schmidt, Franziska Back, Eveline Rudigier-Voigt

Proceedings Volume 8824, 88240D (2013) https://doi.org/10.1117/12.2023871

KEYWORDS: Silicon, Absorption, Glasses, Crystals, Nanophotonics, Silicon films, Thin film solar cells, Sol-gels, Solids, Solar cells

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Proceedings Article | 10 April 2013 Paper

Fast simulation method for parameter reconstruction in optical metrology

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Bernd Bodermann

Proceedings Volume 8681, 868119 (2013) https://doi.org/10.1117/12.2011154

KEYWORDS: Computer simulations, Light scattering, Optical metrology, Scatterometry, Electromagnetism, Finite element methods, Near field, Critical dimension metrology, Scattering, Statistical modeling

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Proceedings Article | 25 March 2013 Paper

FEM-based optical modeling of silicon thin-film tandem solar cells with randomly textured interfaces in 3D

Martin Hammerschmidt, Daniel Lockau, Sven Burger, Frank Schmidt, Christoph Schwanke, Simon Kirner, Sonya Calnan, Bernd Stannowski, Bernd Rech

Proceedings Volume 8620, 86201H (2013) https://doi.org/10.1117/12.2001789

KEYWORDS: Monte Carlo methods, Absorption, Interfaces, Solar cells, Chemical elements, 3D modeling, Computer simulations, Transparent conductors, Finite element methods, Prisms

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Proceedings Article | 6 March 2013 Paper

Efficient design of photonic integrated circuits (PICs) by combining device- and circuit- level simulation tools

C. Arellano, S. Mingaleev, I. Koltchanov, A. Richter, J. Pomplun, S. Burger, F. Schmidt

Proceedings Volume 8627, 862711 (2013) https://doi.org/10.1117/12.2004378

KEYWORDS: Photonic integrated circuits, Device simulation, Waveguides, Finite element methods, Chemical elements, Instrument modeling, 3D modeling, Integrated circuit design, Integrated optics, Ions

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Proceedings Article | 5 March 2013 Paper

Advanced finite-element methods for design and analysis of nanooptical structures: applications

Sven Burger, Lin Zschiedrich, Jan Pomplun, Mark Blome, Frank Schmidt

Proceedings Volume 8642, 864205 (2013) https://doi.org/10.1117/12.2001094

KEYWORDS: Finite element methods, Photonic crystal fibers, Plasmonics, Photonic crystals, Solar cells, Optical simulations, Nano optics, Integrated optics, Computer simulations, Photomasks

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Proceedings Article | 4 March 2013 Paper

Numerical analysis of nanostructures for enhanced light extraction from OLEDs

Lin Zschiedrich, Horst Greiner, Sven Burger, Frank Schmidt

Proceedings Volume 8641, 86410B (2013) https://doi.org/10.1117/12.2001132

KEYWORDS: Organic light emitting diodes, Finite element methods, Einsteinium, Nanostructures, Maxwell's equations, Numerical analysis, OLED lighting, Computer simulations, Photonic crystals, Light emitting diodes

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Proceedings Article | 28 February 2012 Paper

Thermo-optical simulation of high-power diode lasers

Jan Pomplun, Hans Wenzel, Sven Burger, Lin Zschiedrich, Maria Rozova, Frank Schmidt, Paul Crump, Hossein Ekhteraei, Christoph Schultz, Götz Erbert

Proceedings Volume 8255, 825510 (2012) https://doi.org/10.1117/12.909330

KEYWORDS: Semiconductor lasers, High power lasers, Refractive index, Optical simulations, Thermal effects, Chemical elements, Maxwell's equations, Thermal blooming, Electro optical modeling, Thermal modeling

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Proceedings Article | 28 February 2012 Paper

3D finite element simulation of optical modes in VCSELs

Maria Rozova, Jan Pomplun, Lin Zschiedrich, Frank Schmidt, Sven Burger

Proceedings Volume 8255, 82550K (2012) https://doi.org/10.1117/12.906372

KEYWORDS: Vertical cavity surface emitting lasers, Finite element methods, 3D modeling, Chemical elements, Computer simulations, Optical simulations, Visualization, Thermal effects, Optical components, Maxwell's equations

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Proceedings Article | 21 February 2012 Paper

Combining nanooptical fields and coherent spectroscopy on systems with delocalized excitons

Felix Schlosser, Mario Schoth, Kirankumar Hiremath, Sven Burger, Frank Schmidt, Andreas Knorr, Shaul Mukamel, Marten Richter

Proceedings Volume 8260, 82601V (2012) https://doi.org/10.1117/12.906671

KEYWORDS: Quantum dots, Spectroscopy, Excitons, Polarization, Metals, Nanoplasmonics, Silver, Nanostructures, Field spectroscopy, Waveguides

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Proceedings Article | 14 October 2011 Paper

Investigation of 3D patterns on EUV masks by means of scatterometry and comparison to numerical simulations

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Akiko Kato, Christian Laubis, Frank Scholze

Proceedings Volume 8166, 81661Q (2011) https://doi.org/10.1117/12.896839

KEYWORDS: Extreme ultraviolet, Diffraction, Photomasks, Scatterometry, Computer simulations, Numerical simulations, Multilayers, Sensors, 3D metrology, Extreme ultraviolet lithography

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Proceedings Article | 23 May 2011 Paper

Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 8083, 80831B (2011) https://doi.org/10.1117/12.889831

KEYWORDS: Diffraction, Extreme ultraviolet, Photomasks, Computer simulations, Light scattering, Mirrors, Finite element methods, Near field, Extreme ultraviolet lithography, 3D metrology

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Proceedings Article | 23 May 2011 Paper

Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness

Bernd Kleemann, Julian Kurz, Jochen Hetzler, Jan Pomplun, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8083, 808309 (2011) https://doi.org/10.1117/12.889364

KEYWORDS: Finite element methods, Diffraction, Maxwell's equations, Error analysis, Diffraction gratings, Inverse scattering, Scattering, Electromagnetism, Electromagnetic scattering, Polarization

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Proceedings Article | 23 May 2011 Paper

Reduced basis method for real-time inverse scatterometry

Jan Pomplun, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8083, 808308 (2011) https://doi.org/10.1117/12.889892

KEYWORDS: Scatterometry, Extreme ultraviolet, Error analysis, Data modeling, Diffraction, Chemical elements, Computer simulations, Finite element methods, Maxwell's equations, Reliability

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Proceedings Article | 21 February 2011 Paper

The pole condition as transparent boundary condition for resonance problems: detection of spurious modes

Benjamin Kettner, Frank Schmidt

Proceedings Volume 7933, 79331B (2011) https://doi.org/10.1117/12.874752

KEYWORDS: Chemical elements, Condition numbers, Refractive index, Resonators, Numerical analysis, Matrices, Finite element methods, Waveguides, Inspection, Physics

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Proceedings Article | 21 February 2011 Paper

Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap

Sven Burger, Jan Pomplun, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 7933, 79330T (2011) https://doi.org/10.1117/12.875044

KEYWORDS: Computer simulations, Finite element methods, Nickel, Optical microcavities, Waveguides, Waveguide modes, Modulation, Photonic nanostructures, Dielectrics, Photonic crystals

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Proceedings Article | 21 February 2011 Paper

Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures

Daniel Lockau, Lin Zschiedrich, Sven Burger, Frank Schmidt, Florian Ruske, Bernd Rech

Proceedings Volume 7933, 79330M (2011) https://doi.org/10.1117/12.874967

KEYWORDS: Monte Carlo methods, Silicon, Absorption, Transparent conductors, Interfaces, Solar cells, Glasses, Chemical elements, Silicon films, Optical simulations

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Proceedings Article | 17 January 2011 Paper

Fast online simulation of 3D nanophotonic structures by the reduced basis method

Frank Schmidt, Jan Pomplun, Lin Zschiedrich, Sven Burger

Proceedings Volume 7941, 79410G (2011) https://doi.org/10.1117/12.874726

KEYWORDS: Computer simulations, Photomasks, Chemical elements, Nanophotonics, Optical metrology, Optical lithography, Optical proximity correction, 3D modeling, Source mask optimization, Inverse problems

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Proceedings Article | 25 September 2010 Paper

Reduced basis method for source mask optimization

Jan Pomplun, Lin Zschiedrich, Sven Burger, Frank Schmidt, Jacek Tyminski, Donis Flagello, Nakashima Toshiharu

Proceedings Volume 7823, 78230E (2010) https://doi.org/10.1117/12.866101

KEYWORDS: Source mask optimization, Chemical elements, Photomasks, Error analysis, Optimization (mathematics), Near field, Lithography, Maxwell's equations, Semiconducting wafers, Reliability

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Proceedings Article | 24 February 2010 Paper

Numerical investigation of photonic crystal microcavities in silicon-on-insulator waveguides

Sven Burger, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 7609, 76091Q (2010) https://doi.org/10.1117/12.841867

KEYWORDS: Waveguides, Optical microcavities, Photonic crystals, Finite element methods, Computer simulations, Silicon, Light scattering, Resonators, Light wave propagation, Silica

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Proceedings Article | 17 February 2010 Paper

Numerical investigation of optical resonances in circular grating resonators

Sven Burger, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 7606, 760610 (2010) https://doi.org/10.1117/12.842061

KEYWORDS: Resonators, Waveguides, Silicon, Waveguide modes, Chemical elements, Finite element methods, Nickel, Optical properties, Integrated photonics, Switching

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Proceedings Article | 12 February 2010 Paper

Finite element method for accurate 3D simulation of plasmonic waveguides

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 7604, 76040F (2010) https://doi.org/10.1117/12.841995

KEYWORDS: Plasmonic waveguides, Waveguides, Light wave propagation, Finite element methods, Computer simulations, Silver, Visualization, Magnesium fluoride, Resonators, Nanowires

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Proceedings Article | 23 September 2009 Paper

Reduced basis method for computational lithography

Jan Pomplun, Lin Zschiedrich, Sven Burger, Frank Schmidt

Proceedings Volume 7488, 74882B (2009) https://doi.org/10.1117/12.829639

KEYWORDS: Error analysis, Chemical elements, Optical proximity correction, Photomasks, Computational lithography, Reliability, Semiconducting wafers, Near field, Computer simulations, Scatterometry

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Proceedings Article | 17 June 2009 Paper

Reduced basis method for fast and robust simulation of electromagnetic scattering problems

Jan Pomplun, Frank Schmidt

Proceedings Volume 7390, 73900I (2009) https://doi.org/10.1117/12.827588

KEYWORDS: Error analysis, Chemical elements, Computer simulations, Electromagnetic scattering, Diffraction, Reliability, Finite element methods, Phase shifts, 3D modeling, Light scattering

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Proceedings Article | 17 June 2009 Paper

3D finite-element simulations of enhanced light transmission through arrays of holes in metal films

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Benjamin Kettner, Daniel Lockau

Proceedings Volume 7390, 73900H (2009) https://doi.org/10.1117/12.827543

KEYWORDS: Finite element methods, Metals, Chemical elements, Computer simulations, Maxwell's equations, Numerical analysis, Silver, Lithium, Near field, Surface plasmons

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Proceedings Article | 20 May 2009 Paper

Finite-element simulations of light propagation through circular subwavelength apertures

Sven Burger, Bernd Kleemann, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 7366, 736621 (2009) https://doi.org/10.1117/12.822828

KEYWORDS: 3D modeling, Light scattering, Numerical analysis, Near field, Finite-difference time-domain method, Nanostructures, Maxwell's equations, Silver, Computer simulations, Finite element methods

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Proceedings Article | 17 October 2008 Paper

Benchmark of rigorous methods for electromagnetic field simulations

Sven Burger, Lin Zschiedrich, Frank Schmidt, Peter Evanschitzky, Andreas Erdmann

Proceedings Volume 7122, 71221S (2008) https://doi.org/10.1117/12.801248

KEYWORDS: Finite element methods, Photomasks, Near field, Waveguides, Computer simulations, Lithography, Electromagnetism, Diffraction, Cadmium, Interfaces

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Proceedings Article | 19 May 2008 Paper

Finite element simulation of light propagation in non-periodic mask patterns

Lin Zschiedrich, Frank Schmidt

Proceedings Volume 7028, 702831 (2008) https://doi.org/10.1117/12.793107

KEYWORDS: Scattering, Maxwell's equations, Photomasks, Radio propagation, Waveguides, Chemical elements, Scatterometry, Magnetism, Electromagnetism, Systems modeling

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Proceedings Article | 19 May 2008 Paper

Metrology of EUV masks by EUV-scatterometry and finite element analysis

Jan Pomplun, Sven Burger, Frank Schmidt, Frank Scholze, Christian Laubis, Uwe Dersch

Proceedings Volume 7028, 70280P (2008) https://doi.org/10.1117/12.793032

KEYWORDS: Extreme ultraviolet, Diffraction, Finite element methods, Photomasks, Scanning electron microscopy, Critical dimension metrology, Chemical elements, Cadmium, Scatterometry, Maxwell's equations

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Proceedings Article | 21 March 2008 Paper

Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation

Frank Scholze, Christian Laubis, Gerhard Ulm, Uwe Dersch, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 6921, 69213R (2008) https://doi.org/10.1117/12.771923

KEYWORDS: Extreme ultraviolet, Scatterometry, Critical dimension metrology, Photomasks, Diffraction, Finite element methods, Multilayers, Extreme ultraviolet lithography, Reflectivity, Reflectometry

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Proceedings Article | 7 March 2008 Paper

An efficient and robust mask model for lithography simulation

Zhenhai Zhu, Frank Schmidt

Proceedings Volume 6924, 69243I (2008) https://doi.org/10.1117/12.772987

KEYWORDS: Photomasks, Finite element methods, Lithography, Matrices, Linear elements, Error analysis, Diffraction, Polarization, Solids, Phase shifts

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Proceedings Article | 7 March 2008 Paper

A rigorous finite-element domain decomposition method for electromagnetic near field simulations

Lin Zschiedrich, Sven Burger, Achim Schädle, Frank Schmidt

Proceedings Volume 6924, 692450 (2008) https://doi.org/10.1117/12.771989

KEYWORDS: Maxwell's equations, Electromagnetism, Finite element methods, Photomasks, Chemical elements, Near field, Wave propagation, Computer simulations, Interfaces, Optical lithography

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Proceedings Article | 12 February 2008 Paper

Advanced FEM analysis of optical waveguides: algorithms and applications

Frank Schmidt, Sven Burger, Jan Pomplun, Lin Zschiedrich

Proceedings Volume 6896, 689602 (2008) https://doi.org/10.1117/12.765720

KEYWORDS: Finite element methods, Chemical elements, Waveguides, Maxwell's equations, Cladding, Refractive index, Wave propagation, Zoom lenses, Photonic crystal fibers, Surface plasmons

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Proceedings Article | 30 October 2007 Paper

EMF simulations of isolated and periodic 3D photomask patterns

Sven Burger, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Bernd Küchler, Christoph Nölscher

Proceedings Volume 6730, 67301W (2007) https://doi.org/10.1117/12.746392

KEYWORDS: Finite element methods, Photomasks, Computer simulations, Critical dimension metrology, Near field, Chemical elements, Light scattering, Chromium, Optical lithography, Electromagnetism

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Proceedings Article | 18 June 2007 Paper

Influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks

Frank Scholze, Christian Laubis, Uwe Dersch, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 6617, 66171A (2007) https://doi.org/10.1117/12.726159

KEYWORDS: Extreme ultraviolet, Diffraction, Scatterometry, Critical dimension metrology, Photomasks, Scattering, Light scattering, Finite element methods, Reflectometry, Reflectivity

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Proceedings Article | 18 June 2007 Paper

Finite element analysis of EUV lithography

Jan Pomplun, Sven Burger, Frank Schmidt, Frank Scholze, Christian Laubis, Uwe Dersch

Proceedings Volume 6617, 661718 (2007) https://doi.org/10.1117/12.726156

KEYWORDS: Diffraction, Extreme ultraviolet, Finite element methods, Photomasks, Scatterometry, Scatter measurement, Computer simulations, Extreme ultraviolet lithography, Scanning electron microscopy, Scattering

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Proceedings Article | 18 June 2007 Paper

3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method

Sven Burger, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Thomas Henkel, Bernd Küchler, Christoph Nölscher

Proceedings Volume 6617, 66170V (2007) https://doi.org/10.1117/12.726236

KEYWORDS: Etching, Diffraction, Finite element methods, Photomasks, Computer simulations, Chemical elements, Electromagnetism, Optical lithography, Nanostructures, Radio propagation

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Proceedings Article | 9 February 2007 Paper

Goal oriented adaptive finite element method for precise simulation of optical components

Lin Zschiedrich, Sven Burger, Jan Pomplun, Frank Schmidt

Proceedings Volume 6475, 64750H (2007) https://doi.org/10.1117/12.698167

KEYWORDS: Waveguides, Error analysis, Wave propagation, Chemical elements, Finite element methods, Optical components, Radio propagation, Optical simulations, Waveguide modes, Electromagnetism

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Proceedings Article | 5 February 2007 Paper

FEM investigation of leaky modes in hollow core photonic crystal fibers

Jan Pomplun, Ronald Holzlöhner, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 6480, 64800M (2007) https://doi.org/10.1117/12.700495

KEYWORDS: Finite element methods, Photonic crystal fibers, Cladding, Optical fibers, Refractive index, Adaptive optics, Photonic crystals, Chemical elements, Interfaces, Numerical analysis

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Proceedings Article | 20 October 2006 Paper

Rigorous FEM simulation of EUV masks: influence of shape and material parameters

Jan Pomplun, Sven Burger, Frank Schmidt, Lin Zschiedrich, Frank Scholze, Christian Laubis, Uwe Dersch

Proceedings Volume 6349, 63493D (2006) https://doi.org/10.1117/12.686828

KEYWORDS: Extreme ultraviolet, Finite element methods, Diffraction, Scatterometry, Photomasks, Scatter measurement, Computer simulations, Numerical simulations, Critical dimension metrology, Scattering

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Proceedings Article | 20 October 2006 Paper

Rigorous simulation of 3D masks

Sven Burger, Roderick Köhle, Lin Zschiedrich, Hoa Nguyen, Frank Schmidt, Reinhard März, Christoph Nölscher

Proceedings Volume 6349, 63494Z (2006) https://doi.org/10.1117/12.687816

KEYWORDS: Finite element methods, Chemical elements, Photomasks, Computer simulations, Lithography, Image processing, Diffraction, Polarization, Airborne remote sensing, Photoresist processing

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Proceedings Article | 20 April 2006 Paper

Advanced FEM analysis of nano-optical devices

Sven Burger, Achim Schädle, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 6195, 61950C (2006) https://doi.org/10.1117/12.662942

KEYWORDS: Finite element methods, Magnetism, Chemical elements, Computer simulations, Near infrared, Metamaterials, Optical lithography, Light scattering, Numerical analysis, Photomasks

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Proceedings Article | 28 February 2006 Paper

Advanced finite element method for nano-resonators

Lin Zschiedrich, Sven Burger, Benjamin Kettner, Frank Schmidt

Proceedings Volume 6115, 611515 (2006) https://doi.org/10.1117/12.646252

KEYWORDS: Prisms, Finite element methods, Scattering, Numerical analysis, Light scattering, Metamaterials, Magnetism, Radio propagation, Computing systems, Split ring resonators

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Proceedings Article | 5 November 2005 Paper

Benchmark of FEM, waveguide, and FDTD algorithms for rigorous mask simulation

Sven Burger, Roderick Köhle, Lin Zschiedrich, Weimin Gao, Frank Schmidt, Reinhard März, Christoph Nölscher

Proceedings Volume 5992, 599216 (2005) https://doi.org/10.1117/12.631696

KEYWORDS: Finite element methods, Photomasks, Computer simulations, Diffraction, Finite-difference time-domain method, Polarization, Chemical elements, Solids, Waveguides, Lithography

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Proceedings Article | 27 September 2005 Paper

Numerical investigation of light scattering off split-ring resonators

Sven Burger, Lin Zschiedrich, Roland Klose, Achim Schädle, Frank Schmidt, Christian Enkrich, Stefan Linden, Martin Wegener, Costas Soukoulis

Proceedings Volume 5955, 595503 (2005) https://doi.org/10.1117/12.622184

KEYWORDS: Magnetism, Split ring resonators, Geometrical optics, Near infrared, Light scattering, Chemical elements, Metamaterials, Finite element methods, Polarization, Gold

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Proceedings Article | 31 March 2005 Paper

FEM modeling of 3D photonic crystals and photonic crystal waveguides

Sven Burger, Roland Klose, Achim Schaedle, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 5728, (2005) https://doi.org/10.1117/12.585895

KEYWORDS: Photonic crystals, Waveguides, Chemical elements, 3D modeling, Finite element methods, Magnetism, Light scattering, Refractive index, Scattering, Error analysis

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Proceedings Article | 31 March 2005 Paper

JCMmode: an adaptive finite element solver for the computation of leaky modes

Lin Zschiedrich, Sven Burger, Roland Klose, Achim Schaedle, Frank Schmidt

Proceedings Volume 5728, (2005) https://doi.org/10.1117/12.590372

KEYWORDS: Waveguides, Chemical elements, Lab on a chip, Wave propagation, Metals, Refractive index, Magnetism, Error analysis, Optical design, Silicon

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Proceedings Article | 19 June 2003 Paper

Adaptive numerical methods for problems of integrated optics

Frank Schmidt, Lin Zschiedrich

Proceedings Volume 4987, (2003) https://doi.org/10.1117/12.474356

KEYWORDS: Error analysis, Chemical elements, Waveguides, Mathematical modeling, Optical fibers, Numerical analysis, Integrated optics, Zoom lenses, Computer simulations, Magnetism

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Proceedings Article | 25 August 1994 Paper

Phase-adaptive basis functions for a multilevel finite element solution of the paraxial wave equation

F. Schmidt

Proceedings Volume 2212, (1994) https://doi.org/10.1117/12.185149

KEYWORDS: Chemical elements, Wave propagation, Matrices, Error analysis, Finite element methods, Integrated optics, Computer simulations, Waveguides, Optical components, Refractive index

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