Mr. Jan-Pieter van Delft Profile

Jan-Pieter van Delft

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 20 March 2020 Paper

On-product focus monitoring and control for immersion lithography in 3D-NAND manufacturing

Amine Lakcher, Ahmed Zayed, Jennifer Shumway, Jan-Pieter van Delft, Gratiela Isai, Ruxandra Mustata, Arno van den Brink, Taeddy Kim, Jay Jung, Yong-Sik Shin, Soo-Kyung Lee, Paul Böcker, Mohamed El Kodadi, Geert Vinken, ChanHa Park, Sangjun Han, Jeongsu Park, Beomki Shin, Gunwoong Lee

Proceedings Volume 11325, 1132521 (2020) https://doi.org/10.1117/12.2552930

KEYWORDS: Semiconducting wafers, Metrology, Scanners, Immersion lithography, Critical dimension metrology, Lithography, Lithographic process control

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Proceedings Article | 11 April 2017 Presentation + Paper

Process margin improvement through finger-print removal based on scanner leveling data

Young Jun Kim, Tony Park, Jeong Heung Kong, Dong Kyung Han, Jin Phil Choi, Young Seog Kang, Se Yeon Jang, Jeroen Cottaar, Jan-Pieter van Delft, Jeroen Rutten, Axel von Sydow, Marcel Bontekoe, Maarten Boogaarts, Arjan Donkerbroek, Ruiyue Ouyang, Balaji Rangarajan, Khalid Elbattay, Andrew Moe, Chung-Yong Kim

Proceedings Volume 10147, 1014709 (2017) https://doi.org/10.1117/12.2258184

KEYWORDS: Manufacturing

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