Mr. Michael Meng Profile

Michael Meng

at Yangtze Memory Technologies Co Ltd

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Publications (1)

Proceedings Article | 20 March 2020 Presentation + Paper

Machine learning and hybrid metrology using HV-SEM and optical methods to monitor channel hole tilting in-line for 3D NAND wafer production

Michael Meng, Leeming Tu, Jian Mi, Haydn Zhou, Xi Zou

Proceedings Volume 11325, 113250O (2020) https://doi.org/10.1117/12.2551622

KEYWORDS: Semiconducting wafers, Machine learning, Wafer-level optics, 3D metrology, Metrology, Channel projecting optics, Optical metrology, Principal component analysis, Scanning electron microscopy, Etching

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