Satoru Jimbo
at Canon Inc
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 26 August 2024 Paper
Proceedings Volume 13177, 1317709 (2024) https://doi.org/10.1117/12.3032446
KEYWORDS: Nanoimprint lithography, Artificial intelligence, Lithography, Overlay metrology, Metrology, Optical lithography, Data modeling, Manufacturing, Computer simulations, Semiconducting wafers

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540Z (2024) https://doi.org/10.1117/12.3009839
KEYWORDS: Nanoimprint lithography, Artificial intelligence, Lithography, Metrology, Computer simulations

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12497, 124970D (2023) https://doi.org/10.1117/12.2658127
KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Overlay metrology, Particles, Optical lithography, Logic, Distortion, Semiconductors, Optical components, Molybdenum

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 1185509 (2021) https://doi.org/10.1117/12.2601937
KEYWORDS: Distortion, Photomasks, Nanoimprint lithography, Semiconducting wafers, Overlay metrology

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11610, 1161007 (2021) https://doi.org/10.1117/12.2584720
KEYWORDS: Nanoimprint lithography, Manufacturing, Computational lithography, Semiconductors, Semiconductor manufacturing, Optical lithography, Semiconducting wafers, Photomasks, Ultraviolet radiation, Physics

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