Dr. Yong Hee Choi Profile

Dr. Yong Hee Choi

at Lam Research Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

Minbok Jung, Yong Hee Choi, Seung Park, Se Myoung Oh, Sanghak Kim, Jongjin Park, Sangjun Cho, Jeongyeon Seo, Chul Woong Lee, David Lo, Keun Hee Bai

Proceedings Volume 12958, 1295803 (2024) https://doi.org/10.1117/12.3009115

KEYWORDS: Metals, Resistance, Optical lithography, Ions, Transmission electron microscopy, Plasma, Oxygen, Oxides, Oxidation, Nanostructures

Proceedings Article | 30 April 2023 Presentation

Seung Park, Yong Hee Choi, David Lo, Mark Kawaguchi, Christine Das

Proceedings Volume PC12499, PC124990C (2023) https://doi.org/10.1117/12.2659121

KEYWORDS: Plasma generation, 3D equipment, Plasma, Photoresist materials, Chemistry, Oxygen, Emission spectroscopy

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