Prof. Margaret M. Murnane
at JILA
SPIE Involvement:
Author
Publications (49)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295513 (2024) https://doi.org/10.1117/12.3009911
KEYWORDS: Extreme ultraviolet, Polymers, Diffraction, Scatterometry, Reflectometry, Metamaterials, Scanning transmission electron microscopy, Biological samples, Charge-coupled devices, Statistical modeling

Proceedings Article | 28 September 2023 Poster + Paper
Proceedings Volume 12656, 126560U (2023) https://doi.org/10.1117/12.2679845
KEYWORDS: Magnetism, X-rays, X-ray imaging, Physics, Coherence imaging, 3D image processing, Optical coherence, Nanoimaging, Tomography, Spatial resolution

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12496, 124960A (2023) https://doi.org/10.1117/12.2670528
KEYWORDS: Metrology, Light sources, Extreme ultraviolet, Photomasks, Illumination engineering, Diffraction, Signal processing, Phase shift keying, Light sources and illumination, Beam divergence

Proceedings Article | 27 April 2023 Presentation + Paper
Yuka Esashi, Nicholas Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua Knobloch, Henry Kapteyn, Margaret Murnane
Proceedings Volume 12496, 1249614 (2023) https://doi.org/10.1117/12.2658543
KEYWORDS: Reflectometry, Extreme ultraviolet, Nanostructures, Diffraction, Surface roughness, Metrology, Phase retrieval, High harmonic generation, Chemical composition

Proceedings Article | 27 April 2023 Poster + Paper
Brendan McBennett, Albert Beardo, Emma Nelson, Baowen Li, Henry Kaptyen, Margaret Murnane, Joshua Knobloch
Proceedings Volume 12496, 124963P (2023) https://doi.org/10.1117/12.2670522
KEYWORDS: Phonons, Silicon, Electrical conductivity, Porosity, Extreme ultraviolet, Crystals, Semiconductors, Nanostructuring, Thermal modeling, 3D modeling

Showing 5 of 49 publications
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