Dr. Swapnajit Chakravarty Profile

Dr. Swapnajit Chakravarty

Associate Professor at Univ of Dayton

SPIE Involvement:

Author

Publications (50)

Proceedings Article | 13 March 2024 Presentation + Paper

Fixed wavelength interferometer sensors for low-cost chem-bio sensing applications

Jianhao Shen, Juan Carlos Gauna, Arushi Rai, Liam McClimans, Roseanna Lawandi, Asela Perera, Madhuri Kango-Singh, Swapnajit Chakravarty

Proceedings Volume 12861, 1286105 (2024) https://doi.org/10.1117/12.3003036

KEYWORDS: Biosensors, Microfluidics, Interferometers, Sensors, Mach Zehnder interferometers, Silicon, Microfluidic imaging, Michelson interferometers, Biological and chemical sensing, Slow light, Silicon photonics

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Proceedings Article | 13 March 2024 Presentation + Paper

Sub-wavelength waveguide Michelson interferometer sensors

Asela Perera, Jianhao Shen, Swapnajit Chakravarty

Proceedings Volume 12861, 1286106 (2024) https://doi.org/10.1117/12.3003051

KEYWORDS: Waveguides, Michelson interferometers, Mach Zehnder interferometers, Silicon, Sensors, Waveguide sensors, Biosensing, Biological and chemical sensing, Silicon photonics, Biosensors, Optical biosensors

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Proceedings Article | 13 March 2024 Presentation

Compact interferometer devices for chip-based chem-bio sensing

Swapnajit Chakravarty, Jianhao Shen, Daniel Donnelly, Asela Perera

Proceedings Volume PC12861, PC1286102 (2024) https://doi.org/10.1117/12.3002996

KEYWORDS: Fourier transform interferometers, Mach Zehnder interferometers, Laser resonators, Sensors, Microresonators, Biological and chemical sensing, Optical microcavities, Fourier transforms, Spectroscopy, Resonators

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Proceedings Article | 15 June 2023 Presentation + Paper

A compact Michelson interferometer based on-chip Fourier transform spectrometer

Daniel Donnelly, Jianhao Shen, Swapnajit Chakravarty

Proceedings Volume 12516, 125160F (2023) https://doi.org/10.1117/12.2663712

KEYWORDS: Spectroscopy, Fourier transforms, Fourier transform interferometers, Michelson interferometers, Interferometers, Waveguides, Mach Zehnder interferometers, Reflection, Photonic integrated circuits, Silicon photonics

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Proceedings Article | 13 June 2023 Presentation + Paper

Reflected path enhanced absorbance in an integrated photonic sensor

Jianhao Shen, Daniel Donnelly, Swapnajit Chakravarty

Proceedings Volume 12532, 125320R (2023) https://doi.org/10.1117/12.2664033

KEYWORDS: Waveguides, Reflection, Mach Zehnder interferometers, Absorbance, Sensors, Slow light, Absorption, Photonic crystals, Michelson interferometers, Photonic integrated circuits, Silicon photonics, Lab on a chip

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Proceedings Article | 17 March 2023 Poster + Paper

Compact atto-joule-per-bit bus-coupled photonic crystal nanobeam switches

Jianhao Shen, Daniel Donnelly, Swapnajit Chakravarty

Proceedings Volume 12424, 1242412 (2023) https://doi.org/10.1117/12.2649250

KEYWORDS: Photonic crystals, Doping, Quantum switching, Silicon, Refractive index, Switching, Waveguides, Capacitance, Optical switching, Modulation

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Proceedings Article | 17 March 2023 Poster + Paper

Integrated photonic slow light Michelson interferometer bio sensor

Jianhao Shen, Daniel Donnelly, Swapnajit Chakravarty

Proceedings Volume 12424, 124241B (2023) https://doi.org/10.1117/12.2650514

KEYWORDS: Waveguides, Photonic crystals, Biosensors, Slow light, Michelson interferometers, Silicon photonics, Silicon, Phase shifts, Integrated photonics, Cladding

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Proceedings Article | 1 February 2023 Paper

Compact, multiplexed, energy-efficient silicon nanophotonic switches

Jianhao Shen, Swapnajit Chakravarty

Proceedings Volume 12477, 1247703 (2023) https://doi.org/10.1117/12.2647874

KEYWORDS: Doping, Photonic crystals, Waveguides, Silicon, Switching, Refractive index, Modulation, Switches, Modulators, Mirrors

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Proceedings Article | 5 March 2021 Presentation + Paper

Silicon photonics nonlinear switch as conditional circulator for single-aperture LIDAR systems

Mingfei Ding, Yiwei Xie, Changping Zhang, Min Teng, Abu Naim Ahmed, Reza Safian, Swapnajit Chakravarty, Pengcheng Jiao, Daoxin Dai, Leimeng Zhuang

Proceedings Volume 11691, 116910L (2021) https://doi.org/10.1117/12.2583184

KEYWORDS: LIDAR, Switches, Silicon photonics, Complex systems, Silicon, Waveguides, Nonlinear control, Transmitters, Signal to noise ratio, Signal processing

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Proceedings Article | 5 March 2021 Paper

A wideband polarization rotator-splitter based on imec iSiPP50G silicon photonics platform

Tianren Fan, Reza Safian, Swapnajit Chakravarty, Leimeng Zhuang

Proceedings Volume 11691, 1169105 (2021) https://doi.org/10.1117/12.2577924

KEYWORDS: Waveguides, Polarization, Silicon photonics, Silica, Silicon, Semiconducting wafers, Optical alignment, Directional couplers, Cladding

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Proceedings Article | 25 February 2020 Paper

Foundry-compatible thin-film lithium niobate electro-optic modulators

Reza Safian, Swapnajit Chakravarty, Min Teng, Leimeng Zhuang

Proceedings Volume 11283, 112832F (2020) https://doi.org/10.1117/12.2546129

KEYWORDS: Silicon, Waveguides, Thin films, Lithium niobate, Electrodes, Electrooptic modulators, Modulators, Silicon photonics, Oxides, Semiconducting wafers

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Proceedings Article | 4 March 2019 Presentation

Pedestaled subwavelength grating metamaterial waveguide for sensitivity enhancement (Conference Presentation)

Ching-Wen Chang, Xiaochuan Xu, Swapnajit Chakravarty, Hui-Chun Huang, Quark Yungsung Chen, Li-Wei Tu, Ray T. Chen

Proceedings Volume 10895, 108950P (2019) https://doi.org/10.1117/12.2510648

KEYWORDS: Metamaterials, Microrings, Resonators, Waveguides, Sensors, Silicon, Silicon photonics, Biosensing, Photons, Structural design

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Proceedings Article | 4 March 2019 Paper

Compact integrated photonic components for lambda=3-15 micron

Swapnajit Chakravarty, Jason Midkiff, Kyoungmin Yoo, Chi-Jui Chung, Ali Rostamian, Ray Chen

Proceedings Volume 10921, 109210D (2019) https://doi.org/10.1117/12.2508885

KEYWORDS: Waveguides, Polarization, Cladding, Quantum cascade lasers, Wave propagation, Mid-IR, Silicon, Sensors, Indium gallium arsenide, Etching

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Proceedings Article | 1 February 2019 Paper

Monolithic integration of quantum cascade laser, quantum cascade detector, and subwavelength waveguides for mid-infrared integrated gas sensing

Swapnajit Chakravarty, Jason Midkiff, Kyoungmin Yoo, Ali Rostamian, Ray Chen

Proceedings Volume 10926, 109261V (2019) https://doi.org/10.1117/12.2508873

KEYWORDS: Waveguides, Quantum cascade lasers, Sensors, Quantum chromodynamics, Wafer bonding, Mid-IR, Photonic crystals, Semiconducting wafers, Silicon, Indium gallium arsenide

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Proceedings Article | 23 February 2017 Presentation + Paper

Enhanced surface sensitivity in microring resonator biosensor based on subwavelength grating waveguides

Hai Yan, Lijun Huang, Xiaochuan Xu, Naimei Tang, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 10081, 100810G (2017) https://doi.org/10.1117/12.2250408

KEYWORDS: Microrings, Waveguides, Resonators, Biosensors, Silicon, Sensors, Biosensing, Integrated photonics, Wave propagation, Integrated optics, Refractive index, Proteins

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Proceedings Article | 22 February 2017 Presentation + Paper

Models and Raman analysis of molecular nanofilms conjugated on photonic crystal slabs

Zheng Wang, Chao Liu, Erwen Li, Swapnajit Chakravarty, Alan Wang, D. Fan, Ray Chen

Proceedings Volume 10077, 100770G (2017) https://doi.org/10.1117/12.2253392

KEYWORDS: Photonic crystals, Raman spectroscopy, Biosensing, Biosensors, Analytical research, Electromagnetism

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Proceedings Article | 22 February 2017 Presentation + Paper

Low detection limit sensor based on subwavelength grating racetrack resonator

Lijun Huang, Hai Yan, Xiaochuan Xu, Swapnajit Chakravarty, Naimei Tang, Huiping Tian, Ray Chen

Proceedings Volume 10077, 100770M (2017) https://doi.org/10.1117/12.2252429

KEYWORDS: Waveguides, Resonators, Probability theory, Sensors, Nanophotonics, Biosensors, Point-of-care devices, Viruses, Proteins, Breast cancer, Silicon, Refractive index, Microrings, Cladding, Water, Scanning electron microscopy, Magnetic sensors

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Proceedings Article | 20 February 2017 Presentation + Paper

One-dimensional photonic crystal slot waveguide for silicon-organic hybrid electro-optic modulators

Hai Yan, Xiaochuan Xu, Chi-Jui Chung, Harish Subbaraman, Zeyu Pan, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 10109, 101090O (2017) https://doi.org/10.1117/12.2253154

KEYWORDS: Waveguides, Silicon, Modulators, Photonic crystals, Electrooptic modulators, Phase shifts, Slow light, Optical interconnects, Electro optic polymers, Electro optics, Polymers, Teeth, Polymer multimode waveguides, Light wave propagation, Electrodes

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Proceedings Article | 17 February 2017 Presentation + Paper

Guided-mode-resonance coupled localized surface plasmons for dually resonance enhanced Raman scattering sensing

Zheng Wang, Chao Liu, Erwen Li, Swapnajit Chakravarty, Xiaochuan Xu, Alan Wang, D. L. Fan, Ray Chen

Proceedings Volume 10080, 1008003 (2017) https://doi.org/10.1117/12.2253383

KEYWORDS: Nanoparticles, Raman scattering, Surface enhanced Raman spectroscopy, Surface plasmons, Resonance enhancement, Raman spectroscopy, Molecules, Silver, Silica, Photonic crystals

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Proceedings Article | 22 April 2016 Presentation + Paper

High-sensitivity high-throughput chip based biosensor array for multiplexed detection of heavy metals

Hai Yan, Naimei Tang, Grace Jairo, Swapnajit Chakravarty, Diane Blake, Ray Chen

Proceedings Volume 9725, 972507 (2016) https://doi.org/10.1117/12.2212731

KEYWORDS: Metals, Optical microcavities, Sensors, Microfluidics, Photonic crystals, Cadmium, Silicon, Biosensors, Waveguides, Bioalcohols

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Proceedings Article | 4 April 2016 Paper

Miniature mid-infrared thermooptic switch with photonic crystal waveguide based silicon-on-sapphire Mach–Zehnder interferometers

Yi Zou, Swapnajit Chakravarty, Chi-Jui Chung, Ray Chen

Proceedings Volume 9753, 97530Q (2016) https://doi.org/10.1117/12.2214440

KEYWORDS: Silicon, Waveguides, Photonic crystals, Mid-IR, Sapphire, Thermal optics, Switches, Modulation, Switching, Modulators

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Proceedings Article | 18 March 2016 Paper

Silicon chip integrated photonic sensors for biological and chemical sensing

Swapnajit Chakravarty, Yi Zou, Hai Yan, Naimei Tang, Ray Chen

Proceedings Volume 9705, 97050O (2016) https://doi.org/10.1117/12.2223240

KEYWORDS: Optical microcavities, Photonic crystals, Waveguides, Silicon, Light wave propagation, Metals, Sensors, Absorption spectroscopy, Molecules, Slow light

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Proceedings Article | 14 March 2016 Paper

Microheater-integrated silicon coupled photonic crystal microcavities for low-power thermo-optic switching over a wide spectrum

Xingyu Zhang, Swapnajit Chakravarty, Chi-Jui Chung, Zeyu Pan, Hai Yan, Ray Chen

Proceedings Volume 9752, 975214 (2016) https://doi.org/10.1117/12.2213152

KEYWORDS: Optical microcavities, Switching, Switches, Silicon, Photonic crystals, Molecular photonics, Thermal optics, Resonators, Waveguides, Microrings

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Proceedings Article | 23 March 2015 Paper

Wide dynamic range sensing in photonic crystal microcavity biosensors

Chun-Ju Yang, Hai Yan, Yi Zou, Swapnajit Chakravarty, Naimei Tang, Zheng Wang, Ray Chen

Proceedings Volume 9317, 931713 (2015) https://doi.org/10.1117/12.2080645

KEYWORDS: Optical microcavities, Sensors, Photonic crystals, Biosensing, Waveguides, Biosensors, Brain-machine interfaces, Multiplexing, Silicon, Scanning electron microscopy

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Proceedings Article | 13 March 2015 Paper

Ultralow-loss waveguide crossings for the integration of microfluidics and optical waveguide sensors

Zheng Wang, Hai Yan, Zongxing Wang, Yi Zou, Chun-Ju Yang, Swapnajit Chakravarty, Harish Subbaraman, Naimei Tang, Xiaochuan Xu, D. Fan, Alan Wang, Ray Chen

Proceedings Volume 9320, 932012 (2015) https://doi.org/10.1117/12.2078384

KEYWORDS: Waveguides, Microfluidics, Sensors, Photonic crystals, Silicon, Waveguide sensors, Oxides, Wave propagation, Optical microcavities, Cladding

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Proceedings Article | 27 February 2015 Paper

Integrated photonic crystal waveguides on silicon-on-sapphire for chemical sensing in mid-infrared

Yi Zou, Swapnajit Chakravarty, Xiaochuan Xu, Ray Chen

Proceedings Volume 9367, 93670T (2015) https://doi.org/10.1117/12.2080266

KEYWORDS: Waveguides, Silicon, Mid-IR, Photonic crystals, Refractive index, Absorption, Dispersion, Sapphire, Finite-difference time-domain method, Integrated photonics

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Proceedings Article | 8 March 2014 Paper

Comparative sensitivity analysis of integrated optical waveguides for near-infrared volatile organic compounds with 1ppb detection

Wei-Cheng Lai, Yi Zou, Swapnajit Chakravarty, Liang Zhu, Ray Chen

Proceedings Volume 8990, 89900Z (2014) https://doi.org/10.1117/12.2040579

KEYWORDS: Waveguides, Absorbance, Silicon, Absorption, Integrated optics, Absorption spectroscopy, Water, Slow light, Photonic crystals, Infrared spectroscopy

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Proceedings Article | 8 March 2014 Paper

High-performance conformal sensors employing single-crystal silicon nanomembranes

Xiaochuan Xu, Harish Subbaraman, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 8990, 89900U (2014) https://doi.org/10.1117/12.2039888

KEYWORDS: Silicon, Photonic crystals, Etching, Waveguides, Optical microcavities, Single mode fibers, Photonic devices, Polymers, Refractive index, Sensors

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Proceedings Article | 8 March 2014 Paper

Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

Yi Zou, Harish Subbaraman, Swapnajit Chakravarty, Xiaochuan Xu, Amir Hosseini, Wei-Cheng Lai, Ray Chen

Proceedings Volume 8990, 89900X (2014) https://doi.org/10.1117/12.2040412

KEYWORDS: Waveguides, Mid-IR, Absorbance, Silicon, Absorption, Wave propagation, Infrared spectroscopy, Water, Sapphire, Absorption spectroscopy

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Proceedings Article | 8 March 2014 Paper

Methods to array photonic crystal microcavities for high throughput high sensitivity biosensing on a silicon-chip based platform

Swapnajit Chakravarty, Harish Subbaraman, Yi Zou, Wei-Cheng Lai, Ray Chen

Proceedings Volume 8990, 89900S (2014) https://doi.org/10.1117/12.2040370

KEYWORDS: Optical microcavities, Photonic crystals, Waveguides, Multiplexing, Brain-machine interfaces, Biosensing, Silicon, Silicon photonics, Biosensors, Sensors

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Proceedings Article | 27 March 2013 Paper

Electric field sensor based on electro-optic polymer refilled silicon slot photonic crystal waveguide coupled with bowtie antenna

Xingyu Zhang, Amir Hosseini, Xiaochuan Xu, Shiyi Wang, Qiwen Zhan, Yi Zou, Swapnajit Chakravarty, Ray Chen

Proceedings Volume 8624, 862418 (2013) https://doi.org/10.1117/12.2005925

KEYWORDS: Silicon, Doping, Waveguides, Antennas, Polymers, Photonic crystals, Electro optic polymers, Electric field sensors, Geometrical optics, Slow light

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Proceedings Article | 6 March 2013 Paper

Multiplexed selective detection and identification of TCE and xylene in water by on-chip absorption spectroscopy

Wei-Cheng Lai, Swapnajit Chakravarty, Yi Zou, Ray Chen

Proceedings Volume 8627, 86270K (2013) https://doi.org/10.1117/12.2004367

KEYWORDS: Waveguides, Photonic crystals, Absorption, Multiplexing, Absorbance, Slow light, Brain-machine interfaces, Chemical analysis, Absorption spectroscopy, Infrared spectroscopy

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Proceedings Article | 5 March 2013 Paper

High yield silicon photonic crystal microcavity biosensors with 100fM detection limit

Yi Zou, Swapnajit Chakravarty, Wei-Cheng Lai, Cheng-Chih Hsieh, Ray Chen

Proceedings Volume 8570, 857008 (2013) https://doi.org/10.1117/12.2005149

KEYWORDS: Optical microcavities, Photonic crystals, Waveguides, Silicon photonics, Biosensing, Biosensors, Crystals, Silicon, Polarization, Yield improvement

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Proceedings Article | 5 March 2013 Paper

Silicon photonic crystal microarrays for high throughput label-free detection of lung cancer cell line lysates with sensitivity and specificity

Swapnajit Chakravarty, Wei-Cheng Lai, Yi Zou, Robert Gemmill, Ray Chen

Proceedings Volume 8570, 857005 (2013) https://doi.org/10.1117/12.2003012

KEYWORDS: Optical microcavities, Photonic crystals, Lung cancer, Biosensors, Multiplexing, Waveguides, Sensors, Silicon, Proteins, Cancer

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Proceedings Article | 27 February 2013 Paper

2D silicon-based surface-normal vertical cavity photonic crystal waveguide array for high-density optical interconnects

JaeHyun Ahn, Harish Subbaraman, Liang Zhu, Swapnajit Chakravarty, Emanuel Tutuc, Ray Chen

Proceedings Volume 8630, 86300D (2013) https://doi.org/10.1117/12.2009449

KEYWORDS: Waveguides, Photonic crystals, Silicon, Scanning electron microscopy, Optical interconnects, Etching, Slow light, Optical arrays, Lithography, Image processing

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Proceedings Article | 21 February 2012 Paper

On-chip sensing of volatile organic compounds in water by hybrid polymer and silicon photonic-crystal slot-waveguide devices

Swapnajit Chakravarty, Wei-Cheng Lai, Yi Zou, Ray Chen

Proceedings Volume 8258, 825815 (2012) https://doi.org/10.1117/12.908622

KEYWORDS: Waveguides, Photonic crystals, Absorption, Slow light, Silicon, Silicon photonics, Infrared spectroscopy, Absorption spectroscopy, Polymers, Photonic devices

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Proceedings Article | 1 February 2012 Paper

Photonic crystal microcavity engineering and high-density bio-patterning for chip-integrated microarray applications

Swapnajit Chakravarty, Wei-Cheng Lai, Yi Zou, Ray Chen

Proceedings Volume 8212, 82120A (2012) https://doi.org/10.1117/12.909308

KEYWORDS: Optical microcavities, Photonic crystals, Waveguides, Biosensing, Water, Sensors, Silicon, Printing, Refractive index, Optical lithography

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Proceedings Article | 18 November 2011 Paper

Silicon-nanomembrane-based photonic crystal nanostructures for chip-integrated open sensor systems

Swapnajit Chakravarty, Wei-Cheng Lai, Yi Zou, Cheyun Lin, Xiaolong Wang, Ray Chen

Proceedings Volume 8198, 819802 (2011) https://doi.org/10.1117/12.910878

KEYWORDS: Photonic crystals, Waveguides, Optical microcavities, Silicon, Proteins, Absorption, Methane, Sensors, Absorption spectroscopy, Absorbance

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Proceedings Article | 19 May 2011 Paper

Photonic crystal microarray nanoplatform for high throughput detection of biomolecules

Swapnajit Chakravarty, Wei-Cheng Lai, Kathryn Moncivais, Xiaolong Wang, Che-Yun Lin, Zhiwen Zhang, Ray Chen

Proceedings Volume 8034, 803402 (2011) https://doi.org/10.1117/12.882899

KEYWORDS: Photonic crystals, Optical microcavities, Waveguides, Proteins, Silicon, Molecules, Analytical research, Semiconducting wafers, Biological research, Target detection

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Proceedings Article | 12 May 2011 Paper

Photonic crystal slot waveguide for high sensitivity on-chip near-infrared optical absorption spectroscopy of xylene in water

Swapnajit Chakravarty, Wei-Cheng Lai, Xiaolong Wang, Che-Yun Lin, Ray Chen

Proceedings Volume 8032, 80320N (2011) https://doi.org/10.1117/12.883660

KEYWORDS: Waveguides, Absorption, Photonic crystals, Absorption spectroscopy, Absorbance, Slow light, Infrared spectroscopy, Silicon, Spectroscopy, Water

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Proceedings Article | 9 February 2011 Paper

Group velocity independent coupling into slow light photonic crystal waveguide on silicon nanophotonic integrated circuits

Che-Yun Lin, Xiaolong Wang, Swapnajit Chakravarty, Wei-Cheng Lai, Beom Suk Lee, Ray Chen

Proceedings Volume 7944, 79440K (2011) https://doi.org/10.1117/12.887610

KEYWORDS: Photonic crystals, Waveguides, Slow light, Silicon, Finite-difference time-domain method, Infrared imaging, Nanophotonics, Integrated circuits, Photonic devices, Scanning electron microscopy

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Proceedings Article | 17 January 2011 Paper

Photonic crystal slot waveguide spectrometer for the detection of methane

Swapnajit Chakravarty, Wei-Cheng Lai, Xiaolong Wang, Cheyun Lin, Ray Chen

Proceedings Volume 7941, 79410K (2011) https://doi.org/10.1117/12.873299

KEYWORDS: Photonic crystals, Waveguides, Methane, Absorption, Spectroscopy, Absorbance, Silicon, Spectroscopes, Slow light, Infrared spectroscopy

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Proceedings Article | 24 February 2010 Paper

Ultra-compact silicon nanophotonic modulator based on electro-optic polymer infiltrated slot photonic crystal waveguide

Che-Yun Lin, Beomsuk Lee, Alan Wang, Wei-Cheng Lai, Swapnajit Chakravarty, Yazhao Liu, David Kwong, Ray Chen, Jingdong Luo, Alex Jen

Proceedings Volume 7607, 76070D (2010) https://doi.org/10.1117/12.843884

KEYWORDS: Photonic crystals, Waveguides, Modulators, Silicon, Electro optic polymers, Polymers, Electro optics, Slow light, Modulation, Polymer multimode waveguides

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Proceedings Article | 17 October 2008 Paper

Improving cost of ownership on KLA-Tencor wafer fab reticle inspections by implementing pixel migration via new STARlight2+ capability

Yung-Feng Cheng, Wei-Cyuan Lo, Ming-Jui Chen, Peter Huang, Chunlin Chen, Swapnajit Chakravarty, Paul Yu, Russell Dover

Proceedings Volume 7122, 71223J (2008) https://doi.org/10.1117/12.802331

KEYWORDS: Inspection, Photomasks, Reticles, Semiconducting wafers, Air contamination, Wafer inspection, Metals, Microelectronics, Data processing, Image processing

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Proceedings Article | 19 May 2008 Paper

Fast integrated die-to-die transmitted, reflected and STARlight-2 defect inspection on memory masks

Andy Lan, Jenny Hsu, Swapnajit Chakravarty, Vincent Hsu, Ellison Chen, Eric Lu, John Miller

Proceedings Volume 7028, 70281J (2008) https://doi.org/10.1117/12.793060

KEYWORDS: Inspection, Reticles, Contamination, Photomasks, Defect inspection, Air contamination, Opacity, Semiconducting wafers, Calibration, Defect detection

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Proceedings Article | 19 May 2008 Paper

Improving COO on KLA-Tencor wafer fab reticle inspections by implementing pixel migration as new STARlight2+ capability

S. Yen, Swapnajit Chakravarty, Joe Huang, John Miller, Russell Dover, Den Wang

Proceedings Volume 7028, 70282O (2008) https://doi.org/10.1117/12.793094

KEYWORDS: Inspection, Reticles, Semiconducting wafers, Wafer inspection, Air contamination, Calibration, Systems modeling, Defect detection, Photomasks, Computing systems

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Proceedings Article | 19 May 2008 Paper

Inspectability of PSM masks for the 32nm node using STARlight2+

Chain-Ting Huang, Yung-Feng Cheng, Shih-Ming Kuo, Chun-Hsien Huang, Swapnajit Chakravarty, Joe Huang, Jeff Lin, Den Wang

Proceedings Volume 7028, 70282P (2008) https://doi.org/10.1117/12.793095

KEYWORDS: Inspection, Reticles, Photomasks, Calibration, Reflectivity, Image processing, Contamination, Semiconducting wafers, Lithography, Manufacturing

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Proceedings Article | 25 October 2007 Paper

Optimizing defect inspection strategy through the use of design-aware database control layers

Dvori Stoler, Wayne Ruch, Weimin Ma, Swapnajit Chakravarty, Steven Liu, Ray Morgan, John Valadez, Bill Moore, John Burns

Proceedings Volume 6730, 67303L (2007) https://doi.org/10.1117/12.747302

KEYWORDS: Inspection, Photomasks, Databases, Manufacturing, Defect inspection, Semiconducting wafers, Mask making, Computed tomography, Optical proximity correction, Control systems

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Proceedings Article | 15 May 2007 Paper

Enhancing productivity and sensitivity in mask production via a fast integrated T+R pattern inspection and STARlight-2 contamination inspection on critical layers

Jean-Paul Sier, Eric Haodong Lu, Kaustuve Bhattacharyya, Swapnajit Chakravarty, Michael Lang, Heiko Schmalfuss, Jan Heumann, Thomas Schulmeyer

Proceedings Volume 6607, 66072C (2007) https://doi.org/10.1117/12.728995

KEYWORDS: Inspection, Defect detection, Contamination, Reticles, Photomasks, Defect inspection, Detection and tracking algorithms, Stars, Dysprosium, Optical properties

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