Prof. Lionel C. Kimerling Profile

Prof. Lionel C. Kimerling

Professor and Director, Microphotonics Ctr at Massachusetts Institute of Technology

SPIE Involvement:

Author

Publications (58)

Proceedings Article | 28 June 2023 Open Access

Open Access

Paper

Beyond ray optics: building photonics intuition for waveguide modes using digital simulations and games

Glenda Stump, Erik Verlage, Anne Marshall, Saif Rayyan, Anu Agarwal, Ira Fay, Richard Eberhardt, Sajan Saini, Trevor Morrisey, Christian Gabbianelli, Drew Weninger, Lionel Kimerling

Proceedings Volume 12723, 127231L (2023) https://doi.org/10.1117/12.2670774

KEYWORDS: Simulations, Photonics, Waveguide modes, Waveguides, Photonic integrated circuits, Education and training, Online learning, Video, Optical circuits

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Proceedings Article | 28 June 2023 Open Access

Open Access

Paper

The Massachusetts LEAP network: building a template for a hands-on advanced manufacturing hub in integrated photonics

Drew Weninger, Samuel Serna, Sajan Saini, Luigi Ranno, Erik Verlage, Samuel Bechtold, Pablo Bedoya-Rios, Juejun Hu, Lionel Kimerling, Anuradha Agarwal

Proceedings Volume 12723, 127231Y (2023) https://doi.org/10.1117/12.2670834

KEYWORDS: Integrated photonics, Virtual reality, Education and training, Manufacturing, Photonics, Industry, Design and modelling, Tolerancing, Prototyping, Photonic integrated circuits

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Proceedings Article | 8 March 2023 Presentation + Paper

Presentation + Paper

High density vertical optical interconnects for passive assembly

Drew Weninger, Samuel Serna, Achint Jain, Lionel Kimerling, Anuradha Agarwal

Proceedings Volume 12427, 1242709 (2023) https://doi.org/10.1117/12.2648722

KEYWORDS: Silicon, Silicon nitride, Tolerancing, Design and modelling, Waveguides, Refractive index, Photonic integrated circuits, Optical alignment, Finite-difference time-domain method, Optoelectronic packaging, Integrated photonics, Assembly tolerances, Design for manufacturing

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Proceedings Article | 3 October 2022 Open Access

Open Access

Presentation

The Massachusetts LEAP network: building a template for a hands-on advanced manufacturing hub in integrated photonics (Conference Presentation)

Anuradha Agarwal, Drew Weninger, Lionel Kimerling, Guiru Gu, Cheryl Schnitzer, Karl Kissa, Edward Deveney, Samuel Serna, Elif Demirbas, Douglas Petkie, James Eakin, Jacob Longacre, Adrienne Linnell, Kathy Rentsch, Farhad Vazehgoo, Stephen Adamshick, Nicholas Massa, Andrea Agliati

Proceedings Volume PC12213, PC1221307 (2022) https://doi.org/10.1117/12.2633227

KEYWORDS: Manufacturing, Integrated photonics, Photonics, Prototyping, Photonic integrated circuits, Laser applications, Workforce training, Semiconductors, Scanning transmission electron microscopy, Samarium

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Proceedings Article | 3 October 2022 Open Access

Open Access

Presentation

Online collaborative approach to teaching hands-on photonic integrated circuit (PIC) device testing (Conference Presentation)

Juejun Hu, Jerome Michon, Mikhail Shalaginov, Gillian Micale, Jaime Cardenas, Jelena Notaros, Milica Notaros, Jifeng Liu, Samuel Serna, Pradnya Nagarkar, Lionel Kimerling, Anuradha Agarwal

Proceedings Volume PC12213, PC1221301 (2022) https://doi.org/10.1117/12.2633210

KEYWORDS: Photonic integrated circuits, Integrated photonics, Video, Modulators, Light sources, Design for manufacturing, Waveguides, Wafer testing, Visualization, Resonators

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Proceedings Article | 9 March 2020 Open Access

Open Access

Presentation

The International Integrated Photonic Systems Roadmap: defining the destination and the path (Conference Presentation)

Lionel Kimerling

Proceedings Volume 11284, 112840C (2020) https://doi.org/10.1117/12.2553580

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Proceedings Article | 2 July 2019 Open Access

Open Access

Paper

Integrated photonics and application-specific design on a massive open online course platform

Sajan Saini, Stefan Preble, Miloš Popović, Jaime Cardenas, Alan Kost, Erik Verlage, Gregory Howland, Lionel Kimerling

Proceedings Volume 11143, 111430Y (2019) https://doi.org/10.1117/12.2523878

KEYWORDS: Photonic integrated circuits, Photonics, Integrated photonics, Clouds, Instrument modeling, Device simulation, Manufacturing, Video, Packaging, Silicon

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Proceedings Article | 2 July 2019 Open Access

Open Access

Paper

A modular laboratory curriculum for teaching integrated photonics to students with diverse backgrounds

Samuel Serna, Nancy Hidalgo, Janice Tjan, Kevin McComber, Lionel Kimerling, Erik Verlage, Julie Diop, Juejun Hu, Sajan Saini, Anu Agarwal, Gerald Gagnon, Stefan Preble, Gregory Howland, Matthew van Niekerk, Jeff Steidle, Karl Mcnulty, Jaime Cardenas, Meiting Song, Miloš Popović, Anatoly Khilo, Pradnya Nagarkar, Farhad Vazehgoo, Ira Moskowitz, Guiru Gu, Cheryl Schnitzer, Edward Deveney, Thomas Kling, Douglas Petkie, Jacob Longacre

Proceedings Volume 11143, 111431C (2019) https://doi.org/10.1117/12.2523867

KEYWORDS: Waveguides, Photonics, Photonic integrated circuits, Integrated photonics, Resonators, Wave propagation, Infrared cameras, Cameras, Engineering education, Silicon

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Proceedings Article | 2 July 2019 Open Access

Open Access

Paper

Web-based interactive simulations and virtual lab for photonics education

Erik Verlage, Sajan Saini, Anuradha Agarwal, Samuel Serna, Ryan Kosciolek, Trevor Morrisey, Lionel Kimerling

Proceedings Volume 11143, 111430W (2019) https://doi.org/10.1117/12.2523861

KEYWORDS: Photonics, Virtual reality, Photonic integrated circuits, Integrated photonics, Manufacturing, Packaging, Photonic devices, Device simulation, Waveguides, Computer simulations

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Proceedings Article | 23 May 2018 Presentation

Presentation

Nonlinear optical properties of germanium at mid-infrared wavelengths (Conference Presentation)

Byoung-Uk Sohn, Corentin Monmeyran, Lionel Kimerling, Anuradha Agarwal , Dawn Tan

Proceedings Volume 10684, 1068403 (2018) https://doi.org/10.1117/12.2306265

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Group IV photonic materials such as Si and Ge have been used for monolithic applications including on-chip sensors and optical devices in the mid-IR spectral range. The optical properties of germanium have not been reported experimentally to the same extent as silicon in spite of expected merits over silicon. Germanium is expected to possess advantages as large nonlinear optical coefficients, a broad transparency beyond 10um, and large carrier mobility. In this paper, we report nonlinear refractive indices and multi-photon absorption coefficients over the wavelength range between 2um-5um, measured using closed and open z-scan measurements. Samples are scanned through the focal point of a plano-convex spherical CaF2 lens, where an intensity variation with respect to its spatial location exists. The transmitted laser power is measured by a power meter at different sample positions relative to the focal region. Closed Z-scan measurements utilize an aperture in front of the detector whereas open Z-scan measurements do not. Closed Z-scan measurements are typically used for the quantification of nonlinear refractive indices while open Z-scan measurements are used for the characterization of nonlinear absorption coefficients. The closed Z-scan measurement values are then divided by the open Z-scan measurement values to remove the effects of nonlinear absorption before the nonlinear refractive index is measured by fitting [B.-U. Sohn et al., APL 111(2017)] Ultrashort pulses with a temporal width of 150fs at a1kHz repetition rate are used for the measurements. The mid-infrared optical pulses originate from an optical parametric amplifier and difference frequency pumped by a Ti:sapphire regenerative amplifier. The low repetition rate of the pulses and ultrashort temporal pulse width which is much shorter than the thermal diffusion time scale of 40µs in Ge, is ideal to mitigate effects of heat phonons on the nonlinear effects under study. The nonlinear refractive index of Ge is characterized to possess the highest value, 9.1*10-5cm2/GW at a wavelength of 3um, corresponding to the two photon absorption edge. This result is supported by Kramers-Kronig relation between two photon absorption and nonlinear refractive index n2. The value of n2 is observed to vary between 4*10-5cm2/GW to 5*10-5 cm2/GW within the 3.5-5µm wavelength range. Considering Ge’s bandgap of 0.66eV, two photon absorption and three photon absorption occur in Ge at wavelengths between 2-3.6µm and 3.6-5.5µm respectively. The two photon absorption coefficient has the largest value, 25.6cm/GW at 2.2µm and possesses a relatively constant value with average of 0.71cm3/GW2 between 4-5.5µm. The four photon absorption coefficient is measured to be 0.007cm5/GW3 at 6µm. We further investigate the nonlinear figure of merit (FOM), which is proportional to n2 and inversely related to multi photon absorption coefficient. A large FOM is achieved in wavelengths where n2 is large and multi-photon absorption effects are weak. The FOM has a high value of 0.08 between 2.5 - 3 µm making germanium an efficient material for applications in nonlinear optical devices.

Proceedings Article | 14 May 2018 Presentation + Paper

Presentation + Paper

High gain optical parametric amplification in ultra-silicon-rich nitride (USRN) waveguides

K. J. Ooi, D. K. Ng, J. Choi, E. Sahin, P. Xing, T. Wang, A. K. Chee, L. Kimerling, A. Agarwal, D. T. Tan

Proceedings Volume 10684, 1068406 (2018) https://doi.org/10.1117/12.2306238

KEYWORDS: Waveguides, Nonlinear optics, Silicon, Four wave mixing, Refractive index, Dispersion, Absorption, Photonic crystals, Optical parametric oscillators, Optical amplifiers, Kerr effect

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Proceedings Article | 22 February 2018 Paper

Paper

Broadband athermal waveguides and devices for datacom and telecom applications

Liuqing He, Yuhao Guo, Zhaohong Han, Kazumi Wada, Lionel Kimerling, Jurgen Michel, Anuradha Agarwal, Guifang Li, Lin Zhang

Proceedings Volume 10537, 105371S (2018) https://doi.org/10.1117/12.2291292

KEYWORDS: Waveguides, Silicon, Resonators, Cladding, Microrings, Optoelectronics, Data communications, Polymers, Integrated photonics, Silicon photonics

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Proceedings Article | 21 February 2018 Paper

Paper

Two-octave dispersion flattening with five zero-dispersion wavelengths in the deep mid-IR

Yuhao Guo, Lijuan Xu, Zeinab Jafari, Anu Agarwal, Lionel Kimerling, Guifang Li, Jurgen Michel, Lin Zhang

Proceedings Volume 10541, 105412E (2018) https://doi.org/10.1117/12.2291331

KEYWORDS: Dispersion, Waveguides, Mid-IR, Optoelectronics, Integrated optics, Nonlinear optics, Imaging spectroscopy

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Proceedings Article | 16 February 2018 Presentation + Paper

Presentation + Paper

Agile generation of microresonator-based frequency combs without pump detuning and local temperature controlling

Jing Wang, Lijuan Xu, Yuhao Guo, Lionel Kimerling, Jurgen Michel, Anuradha Agarwal, Guifang Li, Lin Zhang

Proceedings Volume 10518, 105180J (2018) https://doi.org/10.1117/12.2291310

KEYWORDS: Solitons, Frequency combs, Modulation, Microresonators, Thermal effects, Waveguides, Silicon carbide, Picosecond phenomena, Tunable lasers

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Proceedings Article | 12 January 2018 Paper

Paper

Towards on-chip spectroscopy based on a single microresonator

Jing Wang, Yuhao Guo, Zhaohong Han, Lionel Kimerling, Anu M. Agarwal, Jurgen Michel, Guifang Li, Lin Zhang

Proceedings Volume 10622, 1062204 (2018) https://doi.org/10.1117/12.2296417

KEYWORDS: Mid-IR, Mode locking, Waveguides, Microresonators, Dispersion, Solitons, Frequency combs, Germanium, Spectroscopy

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Proceedings Article | 28 April 2017 Open Access

Open Access

Presentation

The mid-IR silicon photonics sensor platform (Conference Presentation)

Lionel Kimerling, Juejun Hu, Anuradha Agarwal

Proceedings Volume 10107, 101070J (2017) https://doi.org/10.1117/12.2257723

KEYWORDS: Sensor networks, Pattern recognition, Reflectivity, Manufacturing, Sensors, Mid-IR, Silicon photonics, Waveguides, Internet, Optical sensors

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Advances in integrated silicon photonics are enabling highly connected sensor networks that offer sensitivity, selectivity and pattern recognition. Cost, performance and the evolution path of the so-called ‘Internet of Things’ will gate the proliferation of these networks. The wavelength spectral range of 3-8um, commonly known as the mid-IR, is critical to specificity for sensors that identify materials by detection of local vibrational modes, reflectivity and thermal emission. For ubiquitous sensing applications in this regime, the sensors must move from premium to commodity level manufacturing volumes and cost. Scaling performance/cost is critically dependent on establishing a minimum set of platform attributes for point, wearable, and physical sensing. Optical sensors are ideal for non-invasive applications. Optical sensor device physics involves evanescent or intra-cavity structures for applied to concentration, interrogation and photo-catalysis functions. The ultimate utility of a platform is dependent on sample delivery/presentation modalities; system reset, recalibration and maintenance capabilities; and sensitivity and selectivity performance. The attributes and performance of a unified Glass-on-Silicon platform has shown good prospects for heterogeneous integration on materials and devices using a low cost process flow. Integrated, single mode, silicon photonic platforms offer significant performance and cost advantages, but they require discovery and qualification of new materials and process integration schemes for the mid-IR. Waveguide integrated light sources based on rare earth dopants and Ge-pumped frequency combs have promise. Optical resonators and waveguide spirals can enhance sensitivity. PbTe materials are among the best choices for a standard, waveguide integrated photodetector. Chalcogenide glasses are capable of transmitting mid-IR signals with high transparency. Integrated sensor case studies of i) high sensitivity analyte detection in solution; ii) gas sensing in air and iii) on-chip spectrometry provide good insight into the tradeoffs being made en route to ubiquitous sensor deployment in an Internet of Things.

Proceedings Article | 28 February 2017 Presentation + Paper

Presentation + Paper

Multipath trapping dynamics of nanoparticles towards an integrated waveguide with a high index contrast

Hao Tian, Lionel Kimerling, Jurgen Michel, Guifang Li, Lin Zhang

Proceedings Volume 10061, 100610P (2017) https://doi.org/10.1117/12.2251590

KEYWORDS: Optical trapping, Nanoparticles, Waveguides, Particles, Optical tweezers, Biosensing, Integrated photonics, Biomedical optics, Photonic devices, Fluid dynamics, Biological research, Water, Microfluidics, Optoelectronics, Integrated optics, Instrumentation engineering

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Proceedings Article | 27 July 2016 Presentation

Presentation

Subwavelength engineered fiber-to-chip silicon-on-sapphire interconnects for mid-infrared applications (Conference Presentation)

Carlos Alonso-Ramos, Zhaohong Han, Xavier Le Roux, Hongtao Lin, Vivek Singh, Pao Tai Lin, Dawn Tan, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Kazumi Wada, Juejun Hu, Anuradha Agarwal, Lionel C. Kimerling

Proceedings Volume 9891, 98911J (2016) https://doi.org/10.1117/12.2229350

KEYWORDS: Mid-IR, Silicon, Silicon photonics, Sensors, Absorption spectroscopy, Photonic integrated circuits, Sapphire, Lab on a chip

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The mid-Infrared wavelength range (2-20 µm), so-called fingerprint region, contains the very sharp vibrational and rotational resonances of many chemical and biological substances. Thereby, on-chip absorption-spectrometry-based sensors operating in the mid-Infrared (mid-IR) have the potential to perform high-precision, label-free, real-time detection of multiple target molecules within a single sensor, which makes them an ideal technology for the implementation of lab-on-a-chip devices. Benefiting from the great development realized in the telecom field, silicon photonics is poised to deliver ultra-compact efficient and cost-effective devices fabricated at mass scale. In addition, Si is transparent up to 8 µm wavelength, making it an ideal material for the implementation of high-performance mid-IR photonic circuits. The silicon-on-insulator (SOI) technology, typically used in telecom applications, relies on silicon dioxide as bottom insulator. Unfortunately, silicon dioxide absorbs light beyond 3.6 µm, limiting the usability range of the SOI platform for the mid-IR. Silicon-on-sapphire (SOS) has been proposed as an alternative solution that extends the operability region up to 6 µm (sapphire absorption), while providing a high-index contrast. In this context, surface grating couplers have been proved as an efficient means of injecting and extracting light from mid-IR SOS circuits that obviate the need of cleaving sapphire. However, grating couplers typically have a reduced bandwidth, compared with facet coupling solutions such as inverse or sub-wavelength tapers. This feature limits their feasibility for absorption spectroscopy applications that may require monitoring wide wavelength ranges. Interestingly, sub-wavelength engineering can be used to substantially improve grating coupler bandwidth, as demonstrated in devices operating at telecom wavelengths. Here, we report on the development of fiber-to-chip interconnects to ZrF4 optical fibers and integrated SOS circuits with 500 nm thick Si, operating around 3.8 µm wavelength. Results on facet coupling and sub-wavelength engineered grating coupler solutions in the mid-IR regime will be compared.

Proceedings Article | 12 February 2016 Paper

Paper

The American Institute for Manufacturing Integrated Photonics: advancing the ecosystem

Thomas Koch, Michael Liehr, Douglas Coolbaugh, John Bowers, Rod Alferness, Michael Watts, Lionel Kimerling

Proceedings Volume 9772, 977202 (2016) https://doi.org/10.1117/12.2220457

KEYWORDS: Manufacturing, Integrated photonics, Ecosystems, Photonic integrated circuits, Silicon photonics, Photonics, Packaging, Electronics, Optics manufacturing, Semiconducting wafers

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Proceedings Article | 4 March 2014 Paper

Paper

Two-cycle pulse generation from mode-locked Kerr frequency combs based on an integrated dispersion-flattened micro-resonator

Lin Zhang, Anuradha Agarwal, Lionel Kimerling, Jurgen Michel

Proceedings Volume 8960, 896004 (2014) https://doi.org/10.1117/12.2037434

KEYWORDS: Dispersion, Solitons, Frequency combs, Waveguides, Mode locking, Microresonators, Resonators, Nonlinear optics, Microrings, Silicon

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Proceedings Article | 9 September 2013 Paper

Paper

Solar spectral variations and their influence on concentrator solar cell performance

Lirong Broderick, Brian Albert, Brian Pearson, Lionel Kimerling, Jurgen Michel

Proceedings Volume 8821, 88210I (2013) https://doi.org/10.1117/12.2035395

KEYWORDS: Solar cells, Germanium, Solar energy, Indium gallium phosphide, Gallium arsenide, Solar concentrators, Meteorology, Atmospheric modeling, Data modeling, System on a chip

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Proceedings Article | 2 February 2012 Paper

Paper

Photo-induced trimming of chalcogenide-assisted silicon photonic circuits

Andrea Melloni, Stefano Grillanda, Antonio Canciamilla, Carlo Ferrari, Francesco Morichetti, Michael Strain, Marc Sorel, Vivek Singh, Anu Agarwal, Lionel Kimerling

Proceedings Volume 8266, 82660A (2012) https://doi.org/10.1117/12.908521

KEYWORDS: Waveguides, Silicon, Visible radiation, Resonators, Tolerancing, Cladding, Silicon photonics, Optical properties, Refractive index, Photonic integrated circuits

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Proceedings Article | 3 June 2011 Paper

Paper

Photothermal nano-cavities for ultra-sensitive chem-bio detection

Juejun Hu, J. David Musgrave, Nathan Carlie, Anu Agarwal, Kathleen Richardson, Lionel Kimerling

Proceedings Volume 8018, 80180W (2011) https://doi.org/10.1117/12.883123

KEYWORDS: Chalcogenide glass, Thermography, Absorption, Spectroscopy, Sensors, Infrared radiation, Resonators, Silicon, Infrared spectroscopy, Thermal optics

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Proceedings Article | 21 May 2011 Paper

Paper

Amorphous InSb and InAs[sub]0.3[/sub]Sb[sub]0.7[/sub] for long wavelength infrared detection

Timothy Zens, Piotr Becla, Anuradha Agarwal, Lionel Kimerling, Alvin Drehman

Proceedings Volume 8012, 80123Y (2011) https://doi.org/10.1117/12.884103

KEYWORDS: Absorption, Long wavelength infrared, Sputter deposition, Sensors, Glasses, Mid-IR, FT-IR spectroscopy, Antimony, Temperature metrology, Refractive index

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Proceedings Article | 17 May 2011 Paper

Paper

Resonant cavity enhancement of polycrystalline PbTe films for IR detectors on Si-ROICs

Jianfei Wang, Timothy Zens, Juejun Hu, Piotr Becla, Anuradha Agarwal, Lionel Kimerling

Proceedings Volume 8034, 80340K (2011) https://doi.org/10.1117/12.884081

KEYWORDS: Photodetectors, Sensors, Quantum efficiency, Mid-IR, Mirrors, Silicon, Reflectivity, Readout integrated circuits, Absorption, Staring arrays

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Proceedings Article | 24 January 2011 Paper

Paper

Development of chipscale chalcogenide glass based infrared chemical sensors

Juejun Hu, J. David Musgraves, Nathan Carlie, Bogdan Zdyrko, Igor Luzinov, Anu Agarwal, Kathleen Richardson, Lionel Kimerling

Proceedings Volume 7945, 79452C (2011) https://doi.org/10.1117/12.871399

KEYWORDS: Absorption, Sensors, Waveguides, Chalcogenide glass, Infrared radiation, Resonators, Microfluidics, Carbon, Infrared sensors, Chemical fiber sensors

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Proceedings Article | 17 January 2011 Paper

Paper

Monolithic integration of chalcogenide glass/iron garnet waveguides and resonators for on-chip nonreciprocal photonic devices

Lei Bi, Juejun Hu, Gerald Dionne, Lionel Kimerling, C. Ross

Proceedings Volume 7941, 794105 (2011) https://doi.org/10.1117/12.875184

KEYWORDS: Waveguides, Garnet, Resonators, Photonic devices, Silicon, Silicon films, Bismuth, Transmittance, Optical isolators, Crystals

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Proceedings Article | 12 February 2010 Paper

Paper

Fabrication and characterization of As2S3/Y3Fe5O12 and Y3Fe5O12/SOI strip-loaded waveguides for integrated optical isolator applications

Lei Bi, Juejun Hu, Lionel Kimerling, C. Ross

Proceedings Volume 7604, 760406 (2010) https://doi.org/10.1117/12.841832

KEYWORDS: Waveguides, Silicon, Crystals, Optical isolators, Resonators, Magnetism, Oxides, Integrated optics, Silicon films, Wave propagation

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Proceedings Article | 25 February 2009 Paper

Paper

Integrating optics and micro-fluidic channels using femtosecond laser irradiation

T. Anderson, J. Hu, M. Ramme, J. Choi, C. Faris, N. Carlie, A. Agarwal, L. Petit, L. Kimerling, K. Richardson, M. Richardson

Proceedings Volume 7203, 72030I (2009) https://doi.org/10.1117/12.815306

KEYWORDS: Glasses, Femtosecond phenomena, Refractive index, Chalcogenide glass, Microfluidics, Waveguides, Sensors, Integrated optics, Channel projecting optics, Wet etching

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Proceedings Article | 10 February 2009 Paper

Paper

As2S3/Sr(Ti0.7Co0.3)O3 and As2S3/Sr(Ti0.6Fe0.4)O3 strip-loaded waveguides for integrated magneto-optical isolator applications

Lei Bi, Hyun-Suk Kim, Juejun Hu, Lionel Kimerling, C. Ross

Proceedings Volume 7218, 721803 (2009) https://doi.org/10.1117/12.809392

KEYWORDS: Waveguides, Absorption, Optical isolators, Silicon, Refractive index, Magnetism, Molybdenum, Ellipsometry, Transmittance, Ferromagnetics

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Proceedings Article | 13 February 2008 Paper

Paper

Process flow innovations for photonic device integration in CMOS

Mark Beals, J. Michel, J. Liu, D. Ahn, D. Sparacin, R. Sun, C. Y. Hong, L. Kimerling, A. Pomerene, D. Carothers, J. Beattie, A. Kopa, A. Apsel, M. Rasras, D. Gill, S. Patel, K. Y. Tu, Y. Chen, A. White

Proceedings Volume 6898, 689804 (2008) https://doi.org/10.1117/12.774576

KEYWORDS: Silicon, Waveguides, Germanium, Oxides, Modulators, Photonic devices, Sensors, Silicon films, Plasma enhanced chemical vapor deposition, Signal processing

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Proceedings Article | 13 February 2008 Paper

Paper

Optical modulation techniques for analog signal processing and CMOS compatible electro-optic modulation

Douglas Gill, Mahmoud Rasras, Kun-Yii Tu, Young-Kai Chen, Alice White, Sanjay Patel, Daniel Carothers, Andrew Pomerene, Robert Kamocsai, James Beattie, Anthony Kopa, Alyssa Apsel, Mark Beals, Jurgen Mitchel, Jifeng Liu, Lionel Kimerling

Proceedings Volume 6898, 689803 (2008) https://doi.org/10.1117/12.777113

KEYWORDS: Modulators, Modulation, Resonators, Silicon, Waveguides, Analog electronics, Electro optics, Signal processing, Electrooptic modulators, Polarization

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Proceedings Article | 12 February 2008 Paper

Paper

Polymer-cladded athermal high-index-contrast waveguides

Winnie Ye, Jurgen Michel, Lionel Kimerling, Louay Eldada

Proceedings Volume 6897, 68970S (2008) https://doi.org/10.1117/12.789478

KEYWORDS: Waveguides, Polymers, Cladding, Silicon, Polymer multimode waveguides, Channel waveguides, Silica, Thermal optics, Refractive index, Temperature metrology

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Proceedings Article | 12 February 2008 Paper

Paper

Design, fabrication, and integration of HIC glass waveguides on a silicon platform

Juejun Hu, Nathan Carlie, Ning-Ning Feng, Laeticia Petit, Anu Agarwal, Kathleen Richardson, Lionel Kimerling

Proceedings Volume 6896, 68960Z (2008) https://doi.org/10.1117/12.763588

KEYWORDS: Waveguides, GRIN lenses, Cladding, Glasses, Optical lithography, Silicon, Scattering, Semiconducting wafers, Photoresist materials, Fabrication

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Proceedings Article | 14 February 2007 Paper

Paper

Low-loss integrated planar chalcogenide waveguides for chemical sensing

Juejun Hu, Vladimir Tarasov, Nathan Carlie, Rong Sun, Laeticia Petit, Anu Agarwal, Kathleen Richardson, Lionel Kimerling

Proceedings Volume 6444, 64440N (2007) https://doi.org/10.1117/12.696996

KEYWORDS: Waveguides, Absorption, Sensors, Microfluidics, Chalcogenides, Antimony, Germanium, Carbon, Biological and chemical sensing, Chalcogenide glass

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Proceedings Article | 9 February 2007 Paper

Paper

Advances in fully CMOS integrated photonic devices

Jurgen Michel, J. Liu, D. Ahn, D. Sparacin, R. Sun, C. Hong, W. Giziewicz, M. Beals, L. Kimerling, A. Kopa, A. Apsel, M. Rasras, D. Gill, S. Patel, K. Tu, Y. Chen, A. White, A. Pomerene, D. Carothers, M. Grove

Proceedings Volume 6477, 64770P (2007) https://doi.org/10.1117/12.706586

KEYWORDS: Waveguides, Sensors, Silicon, Modulators, Optical filters, Resonators, Photodetectors, Microwave radiation, Signal processing, Semiconducting wafers

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Proceedings Article | 1 March 2006 Paper

Paper

Electronic-photonic integrated circuits on the CMOS platform

L. Kimerling, D. Ahn, A. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. Patel, A. Pomerene, M. Rasras, D. Sparacin, K.-Y. Tu, A. White, C. Wong

Proceedings Volume 6125, 612502 (2006) https://doi.org/10.1117/12.654455

KEYWORDS: Waveguides, Silicon, Sensors, Modulators, Signal processing, Photodetectors, Optical filters, Signal attenuation, Germanium, Integrated circuits

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Proceedings Article | 1 March 2006 Paper

Paper

Electronic photonic integrated circuits for high speed, high resolution, analog to digital conversion

F. Kärtner, S. Akiyama, G. Barbastathis, T. Barwicz, H. Byun, D. Danielson, F. Gan, F. Grawert, C. Holzwarth, J. Hoyt, E. Ippen, M. Kim, L. Kimerling, J. Liu, J. Michel, O. Olubuyide, J. Orcutt, M. Park, M. Perrott, M. Popovic, P. Rackich, R. Ram, H. Smith, M. Watts

Proceedings Volume 6125, 612503 (2006) https://doi.org/10.1117/12.655762

KEYWORDS: Germanium, Silicon, Modulators, Modulation, Waveguides, Microrings, Analog electronics, Mode locking, Resonators, Diodes

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Proceedings Article | 7 March 2005 Paper

Paper

On-chip silicon-based waveguide with light guiding in low-index core materials

Yasha Yi, Peter Bermel, Shoji Akiyama, Xiaoman Duan, Lionel Kimerling

Proceedings Volume 5730, (2005) https://doi.org/10.1117/12.589911

KEYWORDS: Silicon, Waveguides, Cladding, Optoelectronics integration, Refractive index, Photonic crystals, Dielectrics, Dielectric polarization, Microelectronics, Sensors

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Proceedings Article | 8 June 2004 Paper

Paper

Germanium on double-SOI photodetectors for 1550-nm operation

Olufemi Dosunmu, Douglas Cannon, Matthew Emsley, Bruno Ghyselen, Jifeng Liu, Lionel Kimerling, M. Unlu

Proceedings Volume 5353, (2004) https://doi.org/10.1117/12.532046

KEYWORDS: Germanium, Photodetectors, Silicon, Absorption, Quantum efficiency, Reflectivity, Semiconducting wafers, Sensors, Semiconductors, Indium gallium arsenide

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Proceedings Article | 28 May 2004 Paper

Paper

Air trench waveguide bend for high-density optical integration

Shoji Akiyama, Kazumi Wada, Jurgen Michel, Lionel Kimerling, Milos Popovic, Hermann Haus

Proceedings Volume 5355, (2004) https://doi.org/10.1117/12.529630

KEYWORDS: Waveguides, Cladding, Wave propagation, Finite-difference time-domain method, Silica, Integrated optics, Fabry–Perot interferometers, Refractive index, Photonic integrated circuits, Fiber couplers

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Proceedings Article | 1 July 2003 Paper

Paper

Monolithic Si-based technology for optical receiver circuits

Douglas Cannon, H.-C. Luan, David Danielson, Samerkhae Jongthammanurak, Jifeng Liu, Jurgen Michel, Kazumi Wada, Lionel Kimerling

Proceedings Volume 4999, (2003) https://doi.org/10.1117/12.482504

KEYWORDS: Germanium, Silicon, Photodetectors, Waveguides, Sensors, Annealing, Receivers, Optical circuits, Diodes, Absorption

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Proceedings Article | 11 July 2002 Paper

Paper

On-chip interconnection beyond semiconductor roadmap: silicon microphotonics

Kazumi Wada, Hsin-Chiao Luan, Desmond Lim, Lionel Kimerling

Proceedings Volume 4870, (2002) https://doi.org/10.1117/12.475558

KEYWORDS: Silicon, Germanium, Waveguides, Clocks, Sensors, Semiconductors, Optical clocks, Resonators, Metals, Absorption

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Proceedings Article | 18 May 2001 Paper

Paper

p-i-n germanium photodetectors integrated on silicon substrates

Lorenzo Colace, Gianlorenzo Masini, Gaetano Assanto, Hsin-Chiao Luan, Lionel Kimerling

Proceedings Volume 4293, (2001) https://doi.org/10.1117/12.426930

KEYWORDS: Germanium, Silicon, Photodetectors, Diodes, Near infrared, Interfaces, Doping, Photodiodes, Heterojunctions, Information operations

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Proceedings Article | 18 May 2001 Paper

Paper

Materials processing technology for the integration of effective Ge p-i-n photodetectors on Si for Si microphotonics

Hsin-Chiao Luan, Meghan Kerner, Lionel Kimerling, Lorenzo Colace, Gianlorenzo Masini, Gaetano Assanto

Proceedings Volume 4293, (2001) https://doi.org/10.1117/12.426929

KEYWORDS: Silicon, Germanium, Annealing, Photodetectors, Transmission electron microscopy, Materials processing, Information operations, Heteroepitaxy, Semiconducting wafers, Field effect transistors

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Proceedings Article | 27 April 2001 Paper

Paper

Growth, crystallization, and room temperature photoluminescence of Er2O3 thin films

Kevin Chen, Sajan Saini, Michal Lipson, Xiaoman Duan, Lionel Kimerling

Proceedings Volume 4282, (2001) https://doi.org/10.1117/12.424773

KEYWORDS: Crystals, Luminescence, Erbium, Thin films, Annealing, Refractive index, Oxides, Plasma, Active optics, Metals

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Proceedings Article | 13 December 2000 Paper

Paper

Evaluation of irradiation-induced deep levels in Si

Kenichiro Kono, Jessica Sandland, Kazumi Wada, Lionel Kimerling

Proceedings Volume 4140, (2000) https://doi.org/10.1117/12.409120

KEYWORDS: Annealing, Charge-coupled devices, Electrons, Silicon, Radiation effects, Carbon, X-rays, Bismuth, Photovoltaics, Chemical species

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Proceedings Article | 15 March 2000 Paper

Paper

Ge-on-Si high-responsivity near-infrared photodetectors

Gianlorenzo Masini, Lorenzo Colace, Gaetano Assanto, Hsin-Chiao Luan, Kazumi Wada, Lionel Kimerling

Proceedings Volume 3953, (2000) https://doi.org/10.1117/12.379609

KEYWORDS: Germanium, Silicon, Photodetectors, Annealing, Heterojunctions, Near infrared, Optoelectronic devices, Heteroepitaxy, Semiconducting wafers, Electronic components

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Proceedings Article | 26 November 1999 Paper

Paper

Performance of polycrystalline silicon waveguide devices for compact on-chip optical interconnection

Kevin Lee, Desmond Lim, Anuradha Agarwal, Daniel Ripin, Harry Fujimoto, Michael Morse, Lionel Kimerling

Proceedings Volume 3847, (1999) https://doi.org/10.1117/12.371246

KEYWORDS: Waveguides, Silicon, Scattering, Single mode fibers, Optical interconnects, Waveguide modes, Integrated optics, Dielectrics, Beam propagation method, Optical communications

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Proceedings Article | 26 November 1999 Paper

Paper

Micron-sized channel-dropping filters using silicon waveguide devices

Desmond Lim, Brent Little, Kevin Lee, Michael Morse, Harry Fujimoto, Hermann Haus, Lionel Kimerling

Proceedings Volume 3847, (1999) https://doi.org/10.1117/12.371238

KEYWORDS: Waveguides, Silicon, Resonators, Microrings, Optical filters, Oxides, Integrated optics, Very large scale integration, Semiconductors, Optical lithography

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Proceedings Article | 6 July 1998 Paper

Paper

How to get light out of silicon: molecular design of precursors for MOCVD of Si:Er

William Rees, Oliver Just, Lionel Kimerling, Michael Morse

Proceedings Volume 3469, (1998) https://doi.org/10.1117/12.312904

KEYWORDS: Erbium, Silicon, Electroluminescence, Silicon films, Crystals, Metalorganic chemical vapor deposition, Chemical elements, X-ray diffraction, Optoelectronic devices, Microelectronics

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Proceedings Article | 7 April 1998 Paper

Paper

Erbium-doped silicon light-emitting devices

Thomas Chen, Anuradha Agarwal, Laura Giovane, James Foresi, Ling Liao, Desmond Lim, Michael Morse, Edward Ouellette, Sang Ahn, Xiaoman Duan, Jurgen Michel, Lionel Kimerling

Proceedings Volume 3279, (1998) https://doi.org/10.1117/12.304419

KEYWORDS: Silicon, Erbium, Waveguides, Luminescence, Photodetectors, Oxygen, Light emitting diodes, Crystals, Absorption, Ions

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Proceedings Article | 25 April 1997 Paper

Paper

Electrical study of crystalline silicon coimplanted with erbium and oxygen

Sang Ahn, Jorg Palm, Bo Zheng, Xiaoman Duan, Anuradha Agarwal, Shelby Nelson, Jurgen Michel, Lionel Kimerling

Proceedings Volume 3007, (1997) https://doi.org/10.1117/12.273848

KEYWORDS: Erbium, Silicon, Luminescence, Oxygen, Annealing, Ions, Excitons, Electrons, Phonons, Resistance

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Proceedings Article | 25 April 1997 Paper

Paper

Small radius bends and large angle splitters in SOI waveguides

James Foresi, Desmond Lim, Ling Liao, Anuradha Agarwal, Lionel Kimerling, M. Tavassoli, M. Cox, Min Cao, Wayne Greene

Proceedings Volume 3007, (1997) https://doi.org/10.1117/12.273843

KEYWORDS: Waveguides, Silicon, Oxides, Crystals, Scattering, Manufacturing, Etching, Doping, Chemical mechanical planarization, Beam propagation method

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Proceedings Article | 25 April 1997 Paper

Paper

Si0.5Ge0.5 relaxed buffer photodetectors and low-loss polycrystalline silicon waveguides for integrated optical interconnects at L=1.3 um

Laura Giovane, Ling Liao, Desmond Lim, Anuradha Agarwal, Eugene Fitzgerald, Lionel Kimerling

Proceedings Volume 3007, (1997) https://doi.org/10.1117/12.273838

KEYWORDS: Waveguides, Photodetectors, Silicon, Absorption, Germanium, Electron beams, Integrated optics, Optical interconnects, Surface roughness, Silicon films

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Proceedings Article | 4 April 1997 Paper

Paper

Silicon for photonics

Lionel Kimerling

Proceedings Volume 3002, (1997) https://doi.org/10.1117/12.271041

KEYWORDS: Silicon, Waveguides, Erbium, Photonics, Silicon photonics, Ions, Sensors, Modulation, Clocks, Optical interconnects

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Proceedings Article | 3 January 1996 Paper

Paper

Nonradiative energy back transfer from erbium in silicon by impurity Auger process

Jorg Palm, F. Gan, Lionel Kimerling

Proceedings Volume 2706, (1996) https://doi.org/10.1117/12.229162

KEYWORDS: Erbium, Silicon, Luminescence, Electroluminescence, Excitons, Continuous wave operation, Electrons, Ions, Light emitting diodes, Temperature metrology

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Proceedings Article | 18 September 1995 Paper

Paper

In-situ wafer contamination detection through rf-PCD Measurements

Jurgen Michel, Marcia Black, G. Norga, Kathryn Black, Hichem M'saad, Lionel Kimerling

Proceedings Volume 2638, (1995) https://doi.org/10.1117/12.221203

KEYWORDS: Semiconducting wafers, Silicon, Copper, Contamination, Oxygen, Nitrogen, Metals, Oxides, Gases, Adsorption

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Showing 5 of 58 publications

Proceedings Volume Editor (1)

SPIE Conference Volume | 17 September 2002

Materials, Devices, and Systems for Display and Lighting

Conference Committee Involvement (4)

Nanoengineering: Fabrication, Properties, Optics, and Devices II

3 August 2005 | San Diego, California, United States

Nanoengineering: Fabrication, Properties, Optics, and Devices

4 August 2004 | Denver, Colorado, United States

Nano- and Micro-Optics for Information Systems

3 August 2003 | San Diego, California, United States

Materials, Devices, and Systems for Display and Lighting

15 October 2002 | Shanghai, China

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